Reoxidation effects on the chemical bonding states of nitrogen accumulated at the oxynitride/silicon interface

Applied Physics Letters

Volumn 77, Issue 2, 2000, Pages 220-222

  Miura, Yoshinao ^a   Ono, Haruhiko ^a   Ando, Koichi ^a  

^a NEC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001235265     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.126930     Document Type: Article

References (12)

1. M. A. Schmidt, F. L. Terry, B. P. Mathur, and S. D. Senturia, IEEE Trans. Electron Devices 35, 1627 (1988).
2. T. Hori, IEEE Trans. Electron Devices 37, 2058 (1990).
3. E. C. Carr and R. A. Buhrman, Appl. Phys. Lett. 63, 54 (1993).
4. Z. H. Lu, S. P. Tay, R. Cao, and P. Pianetta, Appl. Phys. Lett. 67, 2836 (1995).
5. R. I. Hegde, P. J. Tobin, K. G. Reid, B. Maiti, and S. A. Ajuria, Appl. Phys. Lett. 66, 2882 (1995).
6. A. K. Kamath, D. L. Kwong, Y. M. Sun, P. M. Blass, S. Whaley, and J. M. White, Appl. Phys. Lett. 70, 63 (1997).
7. H. Ono, T. Ikarashi, Y. Miura, E. Hasegawa, K. Ando, and T. Kitano, Appl. Phys. Lett. 74, 203 (1999).
8. F. J. Himpsel, F. R. McFeely, A. Taleb-Ibrahimi, and J. A. Yarmoff, Phys. Rev. B 38, 6084 (1988).
9. S. Iwata and A. Ishizaka, J. Appl. Phys. 79, 6653 (1996).
10. Handbook of X-Ray Photoelectron Spectroscopy, edited by G. E. Muilenberg (Perkin-Elmer, Eden Prairie, MN, 1978).
11. G. M. Rignanese, A. Pasquarello, J. C. Charlier, X. Gonze, and R. Car, Phys. Rev. Lett. 79, 5174 (1997).
12. G. Lucovsky, Solid State Commun. 29, 571 (1979).