메뉴 건너뛰기




Volumn 77, Issue 2, 2000, Pages 220-222

Reoxidation effects on the chemical bonding states of nitrogen accumulated at the oxynitride/silicon interface

Author keywords

[No Author keywords available]

Indexed keywords


EID: 0001235265     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.126930     Document Type: Article
Times cited : (20)

References (12)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.