메뉴 건너뛰기




Volumn , Issue , 2006, Pages 442-447

NBTI: An atomic-scale defect perspective

Author keywords

Interface traps; MOSFET; Negative bias temperature instability; Spindependent recombination

Indexed keywords

DEFECT CENTERS; INTERFACE TRAPS; NEGATIVE BIAS TEMPERATURE INSTABILITY; SPIN DEPENDENT RECOMBINATION;

EID: 34047240684     PISSN: 15417026     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/RELPHY.2006.251259     Document Type: Conference Paper
Times cited : (64)

References (35)
  • 1
    • 0041340533 scopus 로고    scopus 로고
    • Negative Bias Temperature Instability: Road to cross in deep submicron silicon semiconductor manufacturing
    • D. K. Schroder and J. A. Babcock, "Negative Bias Temperature Instability: Road to cross in deep submicron silicon semiconductor manufacturing", J. Appl. Phys., 94, pp. 1-18 (2003)
    • (2003) J. Appl. Phys , vol.94 , pp. 1-18
    • Schroder, D.K.1    Babcock, J.A.2
  • 2
    • 10044266222 scopus 로고    scopus 로고
    • A comprehensive model of PMOS NBTI degradation
    • M.A. Alam and S. Mahapatra, "A comprehensive model of PMOS NBTI degradation", Microelectron. Reliability, 45, pp. 71-81 (2005)
    • (2005) Microelectron. Reliability , vol.45 , pp. 71-81
    • Alam, M.A.1    Mahapatra, S.2
  • 6
    • 0842309776 scopus 로고    scopus 로고
    • Universal Recovery Behavior of Negative Bias Temperatures Instability
    • S. Rangan, N. Mielke, and E.C.C. Yeh, "Universal Recovery Behavior of Negative Bias Temperatures Instability", IEEE IEDM, pp. 341-344 (2003)
    • (2003) IEEE IEDM , pp. 341-344
    • Rangan, S.1    Mielke, N.2    Yeh, E.C.C.3
  • 7
    • 11644278982 scopus 로고    scopus 로고
    • 2 system, J. Vac. Sci. Technol. B, 16, pp. 2134-2153 (1998)
    • 2 system", J. Vac. Sci. Technol. B, 16, pp. 2134-2153 (1998)
  • 8
    • 0038306923 scopus 로고    scopus 로고
    • Interface defects responsible for negative-bias temperature instability in plasma-nitrided SiON/Si(100) systems
    • S. Fujieda, Y. Miura, M. Saitoh, E. Hasegawa, S. Koyama, and K. Ando, "Interface defects responsible for negative-bias temperature instability in plasma-nitrided SiON/Si(100) systems" Appl. Phys. Lett., 82, pp. 3677-3679 (2003)
    • (2003) Appl. Phys. Lett , vol.82 , pp. 3677-3679
    • Fujieda, S.1    Miura, Y.2    Saitoh, M.3    Hasegawa, E.4    Koyama, S.5    Ando, K.6
  • 9
  • 10
    • 10044264127 scopus 로고    scopus 로고
    • Characterization of interface defects related to negative-bias temperature instability in ultrathin plasma-nitrided SiON/Si(100) systems
    • S. Fujieda, Y. Miura, M. Saitoh, Y. Teraoka, A. Yoshigoe, "Characterization of interface defects related to negative-bias temperature instability in ultrathin plasma-nitrided SiON/Si(100) systems", Microelectron. Reliability, 45, pp. 57-64 (2005)
    • (2005) Microelectron. Reliability , vol.45 , pp. 57-64
    • Fujieda, S.1    Miura, Y.2    Saitoh, M.3    Teraoka, Y.4    Yoshigoe, A.5
  • 14
    • 20844441892 scopus 로고
    • Effect of bias on radiation-induced paramagnetic defects at the silicon-silicon dioxide interface
    • P. M. Lenahan and P. V. Dressendorfer, "Effect of bias on radiation-induced paramagnetic defects at the silicon-silicon dioxide interface", Appl. Phys. Lett., 41, pp. 542-544 (1982)
    • (1982) Appl. Phys. Lett , vol.41 , pp. 542-544
    • Lenahan, P.M.1    Dressendorfer, P.V.2
  • 15
    • 0021427238 scopus 로고
    • Hole traps and trivalent silicon centers in metal/oxide/silicon devices
    • P. M. Lenahan and P. V. Dressendorfer, "Hole traps and trivalent silicon centers in metal/oxide/silicon devices", J. Appl. Phys., 55, pp. 3495-3499 (1984)
    • (1984) J. Appl. Phys , vol.55 , pp. 3495-3499
    • Lenahan, P.M.1    Dressendorfer, P.V.2
  • 17
    • 36549091646 scopus 로고
    • Interface traps and Pb centers in oxidized (100) silicon wafers
    • G. J. Gerardi, E. H. Poindexter, P. J. Caplan, and N. M. Johnson, "Interface traps and Pb centers in oxidized (100) silicon wafers", Appl. Phys. Lett., 49, pp. 348-350 (1986)
    • (1986) Appl. Phys. Lett , vol.49 , pp. 348-350
    • Gerardi, G.J.1    Poindexter, E.H.2    Caplan, P.J.3    Johnson, N.M.4
  • 19
    • 0000617308 scopus 로고
    • Surface recombination in semiconductors
    • D.J. Fitzgerald and A.S. Grove, "Surface recombination in semiconductors", Surf. Sci., 9, pp. 347-369 (1968)
    • (1968) Surf. Sci , vol.9 , pp. 347-369
    • Fitzgerald, D.J.1    Grove, A.S.2
  • 21
    • 0346539170 scopus 로고
    • Spin-dependent recombination on silicon surface
    • D.J. Lepine, "Spin-dependent recombination on silicon surface", Phys. Rev. B, 6, pp. 436-441 (1972)
    • (1972) Phys. Rev. B , vol.6 , pp. 436-441
    • Lepine, D.J.1
  • 22
    • 0025419448 scopus 로고
    • Spin-dependent recombination at the silicon-silicon dioxide interface
    • P.M. Lenahan and M.A. Jupina, "Spin-dependent recombination at the silicon-silicon dioxide interface," Colloids and Surface, 45, pp. 191-211 (1990)
    • (1990) Colloids and Surface , vol.45 , pp. 191-211
    • Lenahan, P.M.1    Jupina, M.A.2
  • 23
    • 0017930413 scopus 로고
    • Explanation of the large spin-dependent recombination effect in semiconductors
    • D. Kaplan, I. Solomon, and N.F. Mott, "Explanation of the large spin-dependent recombination effect in semiconductors," J. Phys. Lett. (Paris), 39, pp. L51-L54 (1978)
    • (1978) J. Phys. Lett. (Paris) , vol.39
    • Kaplan, D.1    Solomon, I.2    Mott, N.F.3
  • 25
    • 4243434794 scopus 로고
    • Fundamental radiationinduced defect centers in synthetic fused silicas; Atomic chlorine, delocalized E' centers, and a triplet state
    • D.L. Griscom and E.J. Friebele, "Fundamental radiationinduced defect centers in synthetic fused silicas; Atomic chlorine, delocalized E' centers, and a triplet state", Phys. Rev. B, 34, pp. 7524-7533 (1986)
    • (1986) Phys. Rev. B , vol.34 , pp. 7524-7533
    • Griscom, D.L.1    Friebele, E.J.2
  • 29
    • 0037434245 scopus 로고    scopus 로고
    • Relationship between interfacial nitrogen concentration and activation energies of fixed-charge trapping and interface state generation under bias-temperature stress condition
    • S.S. Tan, T.P. Chen, C.H. Ang, and L. Chan, "Relationship between interfacial nitrogen concentration and activation energies of fixed-charge trapping and interface state generation under bias-temperature stress condition," Appl. Phys. Lett., 82, pp. 269-271 (2003)
    • (2003) Appl. Phys. Lett , vol.82 , pp. 269-271
    • Tan, S.S.1    Chen, T.P.2    Ang, C.H.3    Chan, L.4
  • 30
    • 34247887177 scopus 로고    scopus 로고
    • On the dispersive versus Arrhenius temperature activation of NBTI time evolution in plasma nitrided gate oxides: Measurements, theory, and implications
    • D. Varghese, D. Saha, S. Mahapatra, K. Ahmed, F. Nouri, and M. Alam, "On the dispersive versus Arrhenius temperature activation of NBTI time evolution in plasma nitrided gate oxides: measurements, theory, and implications," IEEE IEDM pp. 701-704 (2005)
    • (2005) IEEE IEDM , pp. 701-704
    • Varghese, D.1    Saha, D.2    Mahapatra, S.3    Ahmed, K.4    Nouri, F.5    Alam, M.6
  • 35
    • 79956049210 scopus 로고    scopus 로고
    • Hydrogen redistribution induced by negative-bias temperature stress in metal-oxide-silicon diodes
    • Z. Liu, S. Fujieda, K. Terashima, M. Wilde, and K. Fukutani, "Hydrogen redistribution induced by negative-bias temperature stress in metal-oxide-silicon diodes", Appl. Phys. Lett., 81, pp. 2397-2399 (2002)
    • (2002) Appl. Phys. Lett , vol.81 , pp. 2397-2399
    • Liu, Z.1    Fujieda, S.2    Terashima, K.3    Wilde, M.4    Fukutani, K.5


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.