Spatially averaged model of complex-plasma discharge with self-consistent electron energy distribution

Physical Review E - Statistical, Nonlinear, and Soft Matter Physics

Volumn 70, Issue 4 2, 2004, Pages

  Denysenko, I ^a,d   Yu, M Y ^a   Ostrikov, K ^b,e   Smolyakov, A ^c  

^a RUHR UNIVERSITY BOCHUM   (Germany)

^b UNIVERSITY OF SYDNEY   (Australia)

^c UNIVERSITY OF SASKATCHEWAN   (Canada)

^d V N KARAZIN KHARKIV NATIONAL UNIVERSITY   (Ukraine)

^e NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

BOLTZMAN EQUATION; CAPACITIVELY COUPLED PLASMAS (CCP); DEVICE-GRADE FILMS; INDUCTIVELY COUPLED PLASMAS (ICP);

CAPACITANCE; DUST; ELECTRON TRANSITIONS; GRAIN SIZE AND SHAPE; MATHEMATICAL MODELS; MAXWELL EQUATIONS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SEMICONDUCTOR MATERIALS; SILICON; THERMAL EFFECTS;

ARGON;

EID: 41349089506     PISSN: 15393755     EISSN: None     Source Type: Journal    
DOI: 10.1103/PhysRevE.70.046403     Document Type: Article

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