Self-consistent kinetic theory of a plasma sheath

Physical Review E - Statistical, Nonlinear, and Soft Matter Physics

Volumn 65, Issue 4, 2002, Pages

  Vasenkov, Aleksey V ^a,b   Shizgal, Bernie D ^a  

^a UNIVERSITY OF BRITISH COLUMBIA   (Canada)

^b KUTATELADZE INSTITUTE OF THERMOPHYSICS   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; COMPUTER SIMULATION; ELECTRONS; IONIZATION; MATHEMATICAL MODELS; MONTE CARLO METHODS; PLASMAS; POSITIVE IONS;

BOLTZMANN EQUATION; ION-ION COLLISION; PARTICLE-IN-CELL (PIC); PLASMA PROCESSING;

KINETIC THEORY;

EID: 41349113755     PISSN: 15393755     EISSN: 15502376     Source Type: Journal    
DOI: 10.1103/PhysRevE.65.046404     Document Type: Article

References (35)

1. M. J. Lindenfeld and B. Shizgal, Phys. Rev. A27, 1657 (1983).
2. L. Tonks and I. Langmuir, Phys. Rev. 34, 876 (1929).
3. S. A. Self, Phys. Fluids 6, 1762 (1963).
4. S. A. Self, J. Appl. Phys. 36, 456 (1965).
5. I. Senda, Phys. Plasmas 2, 6 (1995).
6. I. Senda, Phys. Plasmas 4, 1308 (1997).
7. H. P. van de Berg, K. U. Riemann, and G. Ecker, Phys. Fluids B 3, 838 (1991).
8. R. J. Procassini, C. K. Birdsall, and E. C. Morse, Phys. Fluids B 2, 3191 (1990).
9. J. T. Scheuer and G. A. Emmert, Phys. Fluids 31, 1748 (1988).
10. M. E. Riley, Sandia National Lab Report No. SAND95-00775, 1995 (unpublished).
11. M. E. Riley, Sandia National Lab Report No. SAND96-1948, 1996 (unpublished).
12. A. Metze, D. W. Ernie, and H. J. Oskam, J. Appl. Phys. 60, 3081 (1986).
13. M. A. Lieberman, IEEE Trans. Plasma Sci. 16, 38 (1988).
14. K.-U. Riemann, Phys. Fluids 24, 2163 (1981).
15. K.-U. Riemann, J. Phys. D 24, 493 (1991).
16. T. E. Sheridan and J. Goree, Phys. Fluids B 3, 2796 (1991).
17. D. J. Koch and W. N. G. Hitchon, Phys. Fluids B 1, 2239 (1989).
18. M. Hong and G. Emmert, J. Vac. Sci. Technol. B 12, 889 (1994).
19. H.-B. Valentini, J. Phys. D 27, 119 (1994).
20. H.-B. Valentini, E. Glauche, and D. Wolff, Plasma Sources Sci. Technol. 4, 353 (1995).
21. T. E. Nitschke and D. B. Graves, IEEE Trans. Plasma Sci. 23, 717 (1995).
22. V. A. Godyak and N. Sternberg, IEEE Trans. Plasma Sci. 18, 159 (1990).
23. V. A. Godyak and N. Sternberg, Phys. Rev. A 42, 2299 (1990).
24. M. Dalvie, S. Hamaguchi, and R. T. Farouki, Phys. Rev. A 46, 1066 (1992).
25. A. Gilardini, Low Energy Electron Collisions in Gases: Swarm and Plasma Methods Applied to Their Study (Wiley, New York, 1972).
26. A. V. Vasenkov and B. D. Shizgal, Phys. Rev. E 63, 016401 (2001); Phys. Plasmas 9, 691 (2002).
27. A. V. Vasenkov and B. D. Shizgal, Phys. Rev. E 63, 016401 (2001); Phys. Plasmas 9, 691 (2002).
28. B. Shizgal, J. Comp. Physiol. 41, 309 (1981).
29. R. Blackmore and B. Shizgal, Phys. Rev. A 31, 1855 (1985).
30. M. Milchner and C. H. Kruger, Partially Ionized Gases (Wiley, New York, 1973).
31. H. Skullerud, J. Phys. B 6, 728 (1973).
32. S. L. Lin and J. N. Bardsley, J. Chem. Phys. 66, 435 (1977).
33. M. J. Brennan, IEEE Trans. Plasma Sci. 19, 256 (1991).
34. M. Suzuki, T. Tanigushi, and H. Tagashira, J. Phys. D 23, 842 (1990).
35. A. V. Phelps, J. Phys. Chem. Ref. Data 20, 557 (1991).