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Plasma Sources Science and Technology

Volumn 11, Issue 3 A, 2002, Pages

Industrial developments of scientific insights in dusty plasmas

(2) Boufendi, Laïfa a Bouchoule, André a

a UNIVERSITÉ D'ORLÉANS (France)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELECTRON ENERGY LEVELS; ELECTROSTATICS; GLOW DISCHARGES; GROWTH (MATERIALS); NANOSTRUCTURED MATERIALS; PLASMA CONFINEMENT; PLASMA SHEATHS;

DUSTY PLASMAS; ELECTROSTATIC SHEATHS; LOW PRESSURE PLASMA TOOLS; PLASMA CHEMISTRY; SURFACE PROCESSING TECHNOLOGIES;

PLASMAS;

EID: 0036670660 PISSN: 09630252 EISSN: None Source Type: Journal
DOI: 10.1088/0963-0252/11/3A/332 Document Type: Conference Paper

Times cited : (145)

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