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Sensors and Materials

Volumn 20, Issue 1, 2008, Pages 15-34

Atomic-layer deposition for fabricating capacitive micromachined ultrasonic transducers: Initial characterization

(8) Liu, Lingli a Mukdadi, Osama M b Tripp, Marie K a Herrmann, Cari F a,c Hertzberg, Jean R a George, Steven M a,c Bright, Victor M a Shandas, Robin a,d

a University of Colorado at Boulder (United States)

b West Virginia University (United States)

c UNIVERSITY OF COLORADO (United States)

d CHILDREN S HOSPITAL (United States)

Author keywords

Atomic layer deposition; Capacitive micromachined ultrasonic transducers; Medical imaging

Indexed keywords

EID: 41149149614 PISSN: 09144935 EISSN: None Source Type: Journal
DOI: None Document Type: Article

Times cited : (3)

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