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Thin Solid Films
Volumn 413, Issue 1-2, 2002, Pages 16-25
Atomic layer deposition of boron nitride using sequential exposures of BCl3 and NH3
(3)
Ferguson, J D
a
Weimer, A W
b
George, S M
a,b
a
UNIVERSITY OF COLORADO
(
United States
)
b
UCB 450
(
United States
)
Author keywords
Atomic layer deposition; Chemical vapor deposition; Fourier transform infrared (FTIR) spectroscopy
Indexed keywords
AMMONIA; BORON COMPOUNDS; CHEMICAL VAPOR DEPOSITION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; TRANSMISSION ELECTRON MICROSCOPY; ZIRCONIA;
ATOMIC LAYER DEPOSITION (ALD);
THIN FILMS;
EID
:
0037166597
PISSN
:
00406090
EISSN
:
None
Source Type
:
Journal
DOI
:
10.1016/S0040-6090(02)00431-5
Document Type
:
Article
Times cited : (
120
)
References (
40
)
1
85021265268
(1992)
Thin Solid Films
, vol.216
Suntola, T.
1
2
85021280193
(1996)
J. Phys. Chem
, vol.100
George, S.M.
1
Ott, A.W.
2
Klaus, J.W.
3
3
85021292733
(1998)
Curr. Opin. Solid State Mech
, vol.3
Niinisto, L.
1
4
0004028474
H.S. Nalwa (Ed.), Academic Press, San Diego
(2001)
Handbook of Thin Film Materials
Ritala, M.
1
Leskela, M.
2
5
85021296673
(2000)
Chem. Mater
, vol.12
Ferguson, J.D.
1
Weimer, A.W.
2
George, S.M.
3
6
0033689223
(2000)
Thin Solid Films
, vol.371
Ferguson, J.D.
1
Weimer, A.W.
2
George, S.M.
3
7
0034250045
(2000)
Appl. Surf. Sci
, vol.162-163
Ferguson, J.D.
1
Weimer, A.W.
2
George, S.M.
3
8
85021254925
(1976)
Phys. Rev. B
, vol.13
Sichel, E.K.
1
Miller, R.E.
2
Abrahams, M.S.
3
Buiocchi, C.J.
4
9
85021254928
(1988)
Helvetica Phys. Acta
, vol.61
Bujard, P.
1
10
85021285905
(1998)
Thermochim. Acta
, vol.320
Ishida, H.
1
Rimdusit, S.
2
11
85021269431
(1999)
IEEE Trans. Adv. Pack
, vol.22
Wong, C.P.
1
Bollampally, R.S.
2
12
85021286176
(1979)
J. Cryst. Growth
, vol.47
Takahashi, T.
1
Itoh, H.
2
Takeuchi, A.
3
13
85021263248
(1988)
Thin Solid Films
, vol.157
Arya, S.
1
D’Amico, A.
2
14
85021293077
(1995)
J. Cryst. Growth
, vol.153
Shetty, R.
1
Wilcox, W.R.
2
15
85021267523
(1991)
J. Appl. Phys
, vol.70
Bath, A.
1
Vanderput, P.J.
2
Becht, J.G.M.
3
Schoonman, J.
4
Lepley, B.
5
16
85021268422
(1994)
J. Elec. Soc
, vol.141
Nguyen, S.V.
1
Nguyen, T.
2
Treichel, H.
3
Spindler, O.
4
17
85021268122
(1992)
Langmuir
, vol.8
Ballinger, T.H.
1
Wong, J.C.S.
2
Yates, J.T.
3
18
0001422330
(1995)
J. Chem. Soc., Faraday Trans
, vol.91
Possemiers, K.
1
Vrancken, K.
2
Voort, P.V.D.
3
Vansant, E.
4
19
85021299606
(1996)
J. Chem. Soc., Faraday Trans
, vol.92
Possemiers, K.
1
Voort, P.V.D.
2
Vansant, E.
3
20
33748629152
(1997)
J. Chem. Soc., Faraday Trans
, vol.93
Possemiers, K.
1
Impens, N.
2
Vansant, E.
3
21
0000309374
(1993)
Thin Solid Films
, vol.225
Ritala, M.
1
Leskela, M.
2
Nykanen, E.
3
Soininen, P.
4
Niinisto, L.
5
22
0029343154
(1995)
Thin Solid Films
, vol.263
Kumagai, H.
1
Matsumoto, M.
2
Toyoda, K.
3
Obara, M.
4
Suzuki, M.
5
23
85021303360
(1997)
App. Phys. Lett
, vol.70
Klaus, J.W.
1
Ott, A.W.
2
Johnson, J.M.
3
George, S.M.
4
24
85021292227
(1997)
Appl. Phys. Lett
, vol.70
Kumagai, H.
1
Toyoda, K.
2
Kobayashi, K.
3
Obara, M.
4
Iimura, Y.
5
25
0031553497
(1997)
Thin Solid Films
, vol.292
Ott, A.W.
1
Klaus, J.W.
2
Johnson, J.M.
3
George, S.M.
4
26
0031546976
(1997)
Appl. Surf. Sci
, vol.112
Morishita, S.
1
Sugahara, S.
2
Matsumura, M.
3
27
0032204276
(1998)
Surf. Sci
, vol.418
Klaus, J.W.
1
Ott, A.W.
2
Dillon, A.C.
3
George, S.M.
4
28
85021305955
(1997)
J. Cryst. Growth
, vol.180
Ishii, M.
1
Iwai, S.
2
Kawata, H.
3
Ueki, T.
4
Aoyagi, Y.
5
29
0030233425
(1996)
Thin Solid Films
, vol.286
Ritala, M.
1
Saloniemi, H.
2
Leskela, M.
3
Prohaska, T.
4
Friedbacher, G.
5
Grasserbauer, M.
6
30
85021301204
(1998)
Surf. Sci
, vol.415
Han, M.
1
Luo, Y.
2
Moryl, J.E.
3
Osgood, R.M.
4
Chen, J.G.
5
31
85021303401
(2000)
Thin Solid Films
, vol.360
Klaus, J.W.
1
Ferro, S.J.
2
George, S.M.
3
32
85021306034
(1973)
J. Phys. Chem
, vol.77
Hair, M.L.
1
Hertl, W.
2
33
85021286773
(1999)
J. Mater. Chem
, vol.9
Benfer, S.
1
Knozinger, E.
2
34
85021254868
(1985)
Thin Solid Films
, vol.128
Poppa, H.
1
Moorhead, D.
2
Heinemann, K.
3
35
85021308073
(1971)
J. Phys. Chem
, vol.75
Bermudez, V.M.
1
36
85021271088
(1995)
J. Phys. Chem
, vol.99
Dang, Z.
1
Anderson, B.G.
2
Amenomiya, Y.
3
Morrow, B.A.
4
37
85021301159
(1966)
Phys. Rev
, vol.146
Geick, R.
1
Perry, C.H.
2
Rupprecht, G.
3
38
85021263771
(1993)
Langmuir
, vol.9
Baraton, M.I.
1
Merle, T.
2
Quintard, P.
3
Lorenzelli, V.
4
39
85021299095
(1994)
Thin Solid Films
, vol.245
Jager, S.
1
Bewilogua, K.
2
Klages, C.P.
3
40
85021287528
(1981)
J. Cryst. Growth
, vol.53
Takahashi, T.
1
Itoh, H.
2
Kuroda, M.
3
* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.
