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Volumn 2, Issue , 2003, Pages 1955-1959

Capacitive ultrasonic transducers with a new vibrating structrure

Author keywords

[No Author keywords available]

Indexed keywords

BIOLOGICAL MEMBRANES; CELLS; COMPUTER SIMULATION; DIELECTRIC MATERIALS; FINITE ELEMENT METHOD; MICROMACHINING; MOLECULAR VIBRATIONS; PIEZOELECTRIC DEVICES; SILICON;

EID: 4143087400     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (6)

References (11)
  • 1
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    • A surface micromachined ultrasonic air transducer
    • M. Haller et al., A surface micromachined ultrasonic air transducer, IEEE Trans. on UFFC 43(1), 1-6 (1996).
    • (1996) IEEE Trans. on UFFC , vol.43 , Issue.1 , pp. 1-6
    • Haller, M.1
  • 2
    • 0000465254 scopus 로고
    • Condenser transmitters and microphones with solid dielectric diaphragms for airborne ultrasonics
    • W. Kuhl et al., Condenser transmitters and microphones with solid dielectric diaphragms for airborne ultrasonics, Acustica 4, 520 (1954).
    • (1954) Acustica , vol.4 , pp. 520
    • Kuhl, W.1
  • 3
    • 0018293084 scopus 로고
    • Broadband electrostatic acoustic transducer for ultrasonic measurements in liquids
    • J.H. Cantrell et al., Broadband electrostatic acoustic transducer for ultrasonic measurements in liquids, Rev. Sci. Instrum., 50, (1979)
    • (1979) Rev. Sci. Instrum. , vol.50
    • Cantrell, J.H.1
  • 4
    • 0024771463 scopus 로고
    • A silicon electrostatic ultrasonic transducer
    • K. Suzuki et al., A silicon electrostatic ultrasonic transducer, IEEE Trans. on UFFC, 36, no. 6, (1989)
    • (1989) IEEE Trans. on UFFC , vol.36 , Issue.6
    • Suzuki, K.1
  • 5
    • 0026155153 scopus 로고
    • PECVD silicon nitride diaphragm for condenser microphones
    • P.R.Scheeper et al., PECVD silicon nitride diaphragm for condenser microphones, Sensors Actuators A, 4, p.79, (1991)
    • (1991) Sensors Actuators A , vol.4 , pp. 79
    • Scheeper, P.R.1
  • 6
    • 0026953452 scopus 로고
    • A model for an electrostatic ultrasonic transducer with a grooved backplate
    • J. Hietanen et al., A model for an electrostatic ultrasonic transducer with a grooved backplate, IEEE Meas. Sci. Technol., 3, (1992)
    • (1992) IEEE Meas. Sci. Technol. , vol.3
    • Hietanen, J.1
  • 7
    • 0027311368 scopus 로고
    • Diagnostic measurements in capacitive transducers
    • H. Carr and C. Wykes, Diagnostic measurements in capacitive transducers, Ultrasonics, 31, no. 1, (1993)
    • (1993) Ultrasonics , vol.31 , Issue.1
    • Carr, H.1    Wykes, C.2
  • 8
    • 0028896612 scopus 로고
    • Broadband electrostatic transducers: Modelling and experiments
    • M. J. Anderson et al., Broadband electrostatic transducers: modelling and experiments, J. Acoust. Soc. Am., 97, no. 1, (1995)
    • (1995) J. Acoust. Soc. Am. , vol.97 , Issue.1
    • Anderson, M.J.1
  • 9
    • 0029219642 scopus 로고
    • The design and characterization of micromachined air-coupled capacitance transducers
    • D. Schindel et al., The design and characterization of micromachined air-coupled capacitance transducers, IEEE Trans. on UFFC 42, 42 (1995).
    • (1995) IEEE Trans. on UFFC , vol.42 , pp. 42
    • Schindel, D.1
  • 10
    • 0032162663 scopus 로고    scopus 로고
    • The microfabrication of capacitive ultrasonic transducers
    • X. Jin et al., The microfabrication of capacitive ultrasonic transducers, IEEE J. Microelectro-mechanical Syst. 7 (3), 295 (1998).
    • (1998) IEEE J. Microelectro-mechanical Syst. , vol.7 , Issue.3 , pp. 295
    • Jin, X.1
  • 11
    • 0032070835 scopus 로고    scopus 로고
    • Surface micromachined capacitive ultrasonic transducers
    • I. Ladabaum et al., Surface micromachined capacitive ultrasonic transducers, IEEE Trans. on UFFC 45 (3), 678 (1998).
    • (1998) IEEE Trans. on UFFC , vol.45 , Issue.3 , pp. 678
    • Ladabaum, I.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.