-
1
-
-
0029735326
-
A surface micromachined ultrasonic air transducer
-
M. Haller et al., A surface micromachined ultrasonic air transducer, IEEE Trans. on UFFC 43(1), 1-6 (1996).
-
(1996)
IEEE Trans. on UFFC
, vol.43
, Issue.1
, pp. 1-6
-
-
Haller, M.1
-
2
-
-
0000465254
-
Condenser transmitters and microphones with solid dielectric diaphragms for airborne ultrasonics
-
W. Kuhl et al., Condenser transmitters and microphones with solid dielectric diaphragms for airborne ultrasonics, Acustica 4, 520 (1954).
-
(1954)
Acustica
, vol.4
, pp. 520
-
-
Kuhl, W.1
-
3
-
-
0018293084
-
Broadband electrostatic acoustic transducer for ultrasonic measurements in liquids
-
J.H. Cantrell et al., Broadband electrostatic acoustic transducer for ultrasonic measurements in liquids, Rev. Sci. Instrum., 50, (1979)
-
(1979)
Rev. Sci. Instrum.
, vol.50
-
-
Cantrell, J.H.1
-
4
-
-
0024771463
-
A silicon electrostatic ultrasonic transducer
-
K. Suzuki et al., A silicon electrostatic ultrasonic transducer, IEEE Trans. on UFFC, 36, no. 6, (1989)
-
(1989)
IEEE Trans. on UFFC
, vol.36
, Issue.6
-
-
Suzuki, K.1
-
5
-
-
0026155153
-
PECVD silicon nitride diaphragm for condenser microphones
-
P.R.Scheeper et al., PECVD silicon nitride diaphragm for condenser microphones, Sensors Actuators A, 4, p.79, (1991)
-
(1991)
Sensors Actuators A
, vol.4
, pp. 79
-
-
Scheeper, P.R.1
-
6
-
-
0026953452
-
A model for an electrostatic ultrasonic transducer with a grooved backplate
-
J. Hietanen et al., A model for an electrostatic ultrasonic transducer with a grooved backplate, IEEE Meas. Sci. Technol., 3, (1992)
-
(1992)
IEEE Meas. Sci. Technol.
, vol.3
-
-
Hietanen, J.1
-
7
-
-
0027311368
-
Diagnostic measurements in capacitive transducers
-
H. Carr and C. Wykes, Diagnostic measurements in capacitive transducers, Ultrasonics, 31, no. 1, (1993)
-
(1993)
Ultrasonics
, vol.31
, Issue.1
-
-
Carr, H.1
Wykes, C.2
-
8
-
-
0028896612
-
Broadband electrostatic transducers: Modelling and experiments
-
M. J. Anderson et al., Broadband electrostatic transducers: modelling and experiments, J. Acoust. Soc. Am., 97, no. 1, (1995)
-
(1995)
J. Acoust. Soc. Am.
, vol.97
, Issue.1
-
-
Anderson, M.J.1
-
9
-
-
0029219642
-
The design and characterization of micromachined air-coupled capacitance transducers
-
D. Schindel et al., The design and characterization of micromachined air-coupled capacitance transducers, IEEE Trans. on UFFC 42, 42 (1995).
-
(1995)
IEEE Trans. on UFFC
, vol.42
, pp. 42
-
-
Schindel, D.1
-
10
-
-
0032162663
-
The microfabrication of capacitive ultrasonic transducers
-
X. Jin et al., The microfabrication of capacitive ultrasonic transducers, IEEE J. Microelectro-mechanical Syst. 7 (3), 295 (1998).
-
(1998)
IEEE J. Microelectro-mechanical Syst.
, vol.7
, Issue.3
, pp. 295
-
-
Jin, X.1
-
11
-
-
0032070835
-
Surface micromachined capacitive ultrasonic transducers
-
I. Ladabaum et al., Surface micromachined capacitive ultrasonic transducers, IEEE Trans. on UFFC 45 (3), 678 (1998).
-
(1998)
IEEE Trans. on UFFC
, vol.45
, Issue.3
, pp. 678
-
-
Ladabaum, I.1
|