CMOS microhotplate sensor system for operating temperatures up to 500 °C

Sensors and Actuators, B: Chemical

Volumn 117, Issue 2, 2006, Pages 346-352

  Graf, Markus ^a   Barrettino, Diego ^a   Kirstein, Kay Uwe ^a   Hierlemann, Andreas ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

CMOS; Metal oxide; Microhotplate

Indexed keywords

CMOS INTEGRATED CIRCUITS; DOPING (ADDITIVES); ELECTRIC POTENTIAL; ELECTRODES; GEOMETRY; HIGH TEMPERATURE OPERATIONS; INTEGRATED CIRCUIT LAYOUT; MICROMACHINING; NANOSTRUCTURED MATERIALS; OPTIMIZATION; PALLADIUM; PASSIVATION; PLATINUM; THICK FILMS; TIN COMPOUNDS;

LOW-NOISE AMPLIFIER; METAL OXIDES; MICROHOTPLATE; MONOLITHIC SYSTEM; TEMPERATURE MODULATION;

CHEMICAL SENSORS;

EID: 33747137717     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2005.11.012     Document Type: Article

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