Thermal and mechanical analysis of micromachined gas sensors

Journal of Micromechanics and Microengineering

Volumn 13, Issue 5, 2003, Pages 548-556

  Puigcorbe J ^a   Vogel, D ^b   Michel, B ^b   Vila A ^a   Gracia I ^c   Cane C ^c   Morante, J R ^c  

^a Department of Electronics ^*  (Spain)

^b FRAUNHOFER IZM   (Germany)

^c INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; FINITE ELEMENT METHOD; INTERFEROMETRY; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; OPTICAL MICROSCOPY; THERMOGRAPHY (IMAGING);

ELECTROTHERMOMECHANICAL THREE-DIMENSIONAL FINITE ELEMENT MODELLING; INFRARED THERMOGRAPHY; INTERFEROMETRIC MICROSCOPY; MICROMACHINED GAS SENSOR;

CHEMICAL SENSORS;

EID: 0037800654     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/13/5/304     Document Type: Article

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