Thermo-mechanical analysis of micro-drop coated gas sensors

Sensors and Actuators, A: Physical

Volumn 97-98, Issue , 2002, Pages 379-385

  Puigcorbe J ^a   Vila A ^a   Cerda J ^a   Cirera, A ^a   Gracia I ^b   Cane C ^b   Morante, J R ^a  

^a UNIVERSITY OF BARCELONA   (Spain)

^b INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

Author keywords

Drop coating; FEM simulation; Micro hotplate; Thermo mechanical modelling

Indexed keywords

COATING TECHNIQUES; COMPUTER SIMULATION; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; MECHANICAL PROPERTIES; MICROMACHINING; THERMODYNAMICS;

DROP COATING; MICRODROPPING; MICROMACHINED HOT PLATE; THERMOMECHANICAL MODELLING;

CHEMICAL SENSORS;

EID: 0036544005     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(01)00858-5     Document Type: Conference Paper

References (19)

1. 2 sensors: Current status and future trends
2. A substrate for thin film gas sensors in microelectronic technology
3. Design and fabrication of high-temperature micro-hotplates for drop-coated gas sensors
4. 2 gas sensor integrated on silicon oxynitride membrane
5. 2 gas sensors: A status-report
6. x membrane for microheater applications
7. Thin-film gas sensor implemented on a low-power consumption micromachined silicon structure
8. Thermal and mechanical aspects for designing micromachined low power gas sensors
9. Thermal induced stress on the membrane in integrated gas sensor with micro-heater
10. Innovative method of pulverisation coating of prestabilized nanopowders for mass production of gas sensors
11. 4 high performance sensor
12. 2 gas sensor powders
13. Thermal induced stress in dielectric membranes suitable for micromechanised gas sensors
14. Integrated microsensors for microsystems with application in biomedicine and environmental control
15. Micromachined metal oxide gas sensors: Opportunities to improve sensor performance
16. 2 powders for gas sensing microsystems
17. Interfacial stresses in bimetallic thermostats