Enhanced stability of Ti/Pt micro-heaters using a-SiC:H passivation layers

Sensors and Actuators, A: Physical

Volumn 130-131, Issue SPEC. ISS., 2006, Pages 194-201

  Schmid, U ^a   Seidel, H ^a  

^a SAARLAND UNIVERSITY   (Germany)

Author keywords

Amorphous silicon carbide (a SiC:H); Common rail (CR) injection system; Long term stability; LTCC substrate; Thin film micro heater

Indexed keywords

ENVIRONMENTAL ENGINEERING; METALLIZING; PASSIVATION; PLATINUM; SILICON CARBIDE; THERMAL EFFECTS; THIN FILMS;

AMORPHOUS SILICON CARBIDE (A-SIC:H); COMMON-RAIL (CR) INJECTION SYSTEM; LONG-TERM STABILITY; LTCC SUBSTRATE; THIN FILM MICRO-HEATER;

TITANIUM;

EID: 33745810519     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00109-005-0014-4     Document Type: Article

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