Numerical investigation via three-dimensional Monte Carlo modeling of sputtering and deposition processes in a direct current unbalanced magnetron discharge

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 26, Issue 1, 2008, Pages 103-113

  Sobbia, R ^a   Browning, P K ^a   Bradley, J W ^b  

^a UNIVERSITY OF MANCHESTER   (United Kingdom)

^b UNIVERSITY OF LIVERPOOL   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; DEPOSITION; ELASTIC SCATTERING; EROSION; IONIZATION; MONTE CARLO METHODS; SPUTTERING; THREE DIMENSIONAL;

ELECTRON TRANSPORT MODELS; IONIZATION PROCESSES; MAGNETRON DISCHARGE; SELF-CONSISTENT PLASMAS;

MAGNETRONS;

EID: 37849017247     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2816940     Document Type: Article

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