Simulation of sputter deposition at high pressures

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 15, Issue 6, 1997, Pages 2847-2853

  Smy, T ^a   Tan, L ^a   Winterton, S S ^a   Dew, S K ^b   Brett, M J ^b  

^a CARLETON UNIVERSITY   (Canada)

^b UNIVERSITY OF ALBERTA   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0031488761     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580838     Document Type: Article

References (15)

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