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Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 46, Issue 10 B, 2007, Pages 7073-7078

Sensing property of self-sensitive piezoelectric microcantilever utilizing Pb(Zr0.52/Ti0.48)O3 thin film and LaNiO 3 oxide electrode

(5) Kobayashi, Takeshi a Kondou, Ryuichi b Nakamura, Kenatro b Ichiki, Masaaki a Maeda, Ryutaro a

a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST (Japan)

b TAIYO YUDEN CO LTD (Japan)

Author keywords

Film; LNO; MEMS; PZT; Sensor

Indexed keywords

ELECTRODES; LEAD COMPOUNDS; MEMS; MICROFABRICATION; PIEZOELECTRIC DEVICES; SENSORS;

DIELECTRIC LOSS; PIEZOELECTRIC CONSTANT; PIEZOELECTRIC MICROCANTILEVER; SELF SENSITIVE CANTILEVERS;

THIN FILMS;

EID: 35349024346 PISSN: 00214922 EISSN: 13474065 Source Type: Journal
DOI: 10.1143/JJAP.46.7073 Document Type: Article

Times cited : (27)

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