Design, fabrication and RF performances of two different types of piezoelectrically actuated Ohmic MEMS switches

Journal of Micromechanics and Microengineering

Volumn 15, Issue 11, 2005, Pages 2098-2104

  Lee, Hee Chul ^a   Park, Jae Hyoung ^a   Park, Jae Yeong ^a   Nam, Hyo Jin ^a   Bu, Jong Uk ^a  

^a LG Electronics Inc   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ELECTRODES; FREQUENCIES; INSERTION LOSSES; MICROELECTROMECHANICAL DEVICES; PIEZOELECTRIC DEVICES; VOLTAGE CONTROL;

CONTACT ELECTRODES; OPERATION VOLTAGE; PIEZOELECTRIC CANTILEVERS; SIGNAL TRANSMISSION;

SWITCHES;

EID: 27144476111     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/11/015     Document Type: Article

References (23)

1. Yao Z, Chen S, Eshelman S, Denniston D and Goldsmith C 1999 Micromachined low loss microwave switches IEEE J. MEMS 8 129-34
2. Campbell T 2001 MEMS switch technology approaches the ideal switch Appl. Microw. Wirel. 5 100-7
3. Gabriel G M 2003 RF MEMS switches: status of the technology IEEE Transducers Digest pp 1726-9
4. Young J K, Park J Y and Jong U B 2003 Integrated 3-bit RF MEMS phase shifter with constant phase shift for active phased array antennas in satellite broadcasting systems IEEE Transducers Digest pp 1788-91
5. Lee S, Park J H, Kim J M, Kim H T, Kim Y K and Kwon Y 2004 A compact low-loss reconfigurable monolithic low-pass filter using multiple-contact MEMS switches IEEE Microw. Wirel. Compon. Lett. 14 37-9
6. Park J H, Kim H T, Choi W Y, Kwon Y W and Kim Y K 2002 V-band reflection type phase shifters using micromachined CPW coupler and RF switches IEEE J. MEMS 11 808-14
7. Lisec T, Huth C and Wagner B 2004 Dielectric material impact on capacitive RF MEMS reliability Proc. European Microwave Conf. pp 73-6
8. Rottenberg X, Nauwelasers B, De Raedt W and Tilmans H A C 2004 Distributed dielectric charging and its impact on RF MEMS devices Proc. European Microwave Conf. pp 77-80
9. Muldavin J B and Rebeiz G M 2001 All metal high-isolation series and series/shunt MEMS switches IEEE Microw. Wirel. Compon. Lett. 11 373-5
10. Tan G L and Rebeiz G M 2002 A DC-contact MEMS shunt switch IEEE Microw. Wirel. Compon. Lett. 12 212-5
11. Chan R, Lesnick R, Becher D and Feng M 2003 Low-actuation voltage RF MEMS shunt switch with cold switching lifetime of seven billion cycles IEEE J. MEMS 12 713-9
12. Zhu Y and Espinosa H D 2004 Effect of temperature on capacitive RF MEMS switch performance-a couple-field analysis J. Micromech. Microeng. 14 1270-9
13. Oberhammer J and Stemme G 2004 Design and fabrication aspects of an S-shaped film actuator based DC to RF MEMS switch J. MEMS 13 421-8
14. Liu A Q, Tang M, Agarwal A and Alphones A 2005 Low-loss lateral micromachined switches for high frequency applications J. Micromech. Microeng. 15 157-67
15. Cho I J, Song T, Baek S H and Yoon E 2005 A low-voltage push-pull SPDT RF MEMS switch operated by combination of electromagnetic actuation and electrostatic hold Proc. IEEE MEMS pp 32-5
16. Robert Ph, Saias D, Billard C, Boret S, Sillon N, Maeder-Pachurka C, Charvet P L, Bouche G, Ancey P and Berruyer P 2003 IEEE Transducers Digest pp 1714-7
17. Lee H C, Park J Y and Bu J U 2005 Piezoelectrically actuated RF MEMS switches with low voltage operation IEEE Microw. Compon. Lett. 15 202-4
18. Fox C H J, Chen X, Jiang H W, Kirby P B and McWilliam S 2000 Development of micromachined RF switches with piezofilm actuation Proc. SPIE 4700 40-9
19. Crawley E F and Luis J 1987 Use of piezoelectric actuators as elements of intelligent structures AIAA J. 25 1373-85
20. Low T S and Guo W 1995 Modeling of a three-layer piezoelectric bimorph beam with hysteresis IEEE J. MEMS 4 230-7
21. http://www.memsnet.org/material
22. 3 films deposited by electron cyclotron resonance plasma enhanced chemical vapor deposition Japan. J. Appl. Phys. 39 1203-9
23. 2 hybrid electrode for ferroelectric random access memory devices Japan. J. Appl. Phys. 40 6566-73