Degradation in the ferroelectric and piezoelectric properties of Pb(Zr,Ti)O3 thin films derived from a MEMS microfabrication process

Journal of Micromechanics and Microengineering

Volumn 17, Issue 7, 2007, Pages 1238-1241

  Kobayashi, T ^a   Ichiki, M ^a   Kondou, R ^b   Nakamura, K ^b   Maeda, R ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b TAIYO YUDEN CO LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

FERROELECTRIC DEVICES; LEAD COMPOUNDS; MEMS; PIEZOELECTRIC DEVICES; SILICON ON INSULATOR TECHNOLOGY;

FERROELECTRIC PROPERTIES; MEMS MICROFABRICATION; PIEZOELECTRIC MICRO CANTILEVERS; PIEZOELECTRIC PROPERTIES;

THIN FILMS;

EID: 34547598106     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/7/004     Document Type: Article

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