Piezoelectric optical micro scanner with built-in torsion sensors

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 46, Issue 4 B, 2007, Pages 2781-2784

  Kobayashi, Takeshi ^a   Maeda, Ryutaro ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Actuator; Film; MEMS; PZT; Scanner; Sensor

Indexed keywords

ACTUATORS; BIOSENSORS; MEMS; MICROMACHINING; RESONATORS; THIN FILMS; TORSION TESTING;

OUTPUT VOLTAGE; PIEZOELECTRIC SCANNERS; TORSION SENSOR; VIBROMETER;

PIEZOELECTRIC DEVICES;

EID: 34247865794     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.46.2781     Document Type: Article

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