Characterization of micromachined piezoelectric PZT force sensors for dynamic scanning force microscopy

Review of Scientific Instruments

Volumn 68, Issue 5, 1997, Pages 2091-2100

  Lee, Chengkuo ^a,b,c   Itoh, Toshihiro ^a   Maeda, Ryutaro ^b   Suga, Tadatomo ^a  

^a UNIVERSITY OF TOKYO   (Japan)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^c INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTATIONAL METHODS; DAMPING; ELASTIC MODULI; FREQUENCIES; LEAD COMPOUNDS; PERMITTIVITY; PIEZOELECTRICITY; POROSITY; ZINC OXIDE;

LEAD ZIRCONYL TITANATE; PIEZOELECTRIC MICROCANTILEVER; POLING TREATMENT; QUALITY FACTORS; SCANNING FORCE MICROSCOPY; SPRING CONSTANTS;

SENSORS;

EID: 0031145860     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1148102     Document Type: Article

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