Development of self-sensitive piezoelectric cantilever utilizing PZT thin film deposited on SOI wafer

Integrated Ferroelectrics

Volumn 89, Issue 1, 2007, Pages 116-122

  Kobayashi, Takeshi ^a   Ichiki, Masaaki ^a   Maeda, Ryutaro ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Actuator; Cantilever; CSD; MEMS; PZT; Sensor; Thin film

Indexed keywords

EID: 35348933203     PISSN: 10584587     EISSN: 16078489     Source Type: Journal    
DOI: 10.1080/10584580601077641     Document Type: Conference Paper

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