Ultrasonic micro array sensors using piezoelectric thin films and resonant frequency tuning

Sensors and Actuators, A: Physical

Volumn 114, Issue 2-3, 2004, Pages 147-153

  Yamashita, Kaoru ^a   Chansomphou, Latpasamixay ^a   Murakami, Hideyuki ^a   Okuyama, Masanori ^a  

^a OSAKA UNIVERSITY   (Japan)

Author keywords

Phased array; Piezoelectric film; Resonant frequency; Tuning; Ultrasonic sensor

Indexed keywords

FABRICATION; MICROSTRUCTURE; NATURAL FREQUENCIES; PIEZOELECTRIC MATERIALS; SCATTERING; SILICON; THIN FILMS; ULTRASONIC DEVICES;

INKJET PRINTING TECHNOLOGY; PHASED ARRAYS; PIEZOELECTRIC FILMS; ULTRASONIC SENSORS;

SENSORS;

EID: 4344571632     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2003.11.015     Document Type: Article

References (7)

1. 2 cantilever Sens. Mater. 1:1988;13-24.
2. Yamashita K., Katata H., Okuyama M., Miyoshi H., Kato G., Aoyagi S., Suzuki Y., Arrayed ultrasonic microsensors with high directivity for in-air use using PZT thin film on silicon diaphragms. Sens. Actuators A: Phys. 9798:2002;302-307.
3. Bernstein J.J., Finberg S.L., Houston K., Niles L.C., Chen H.D., Cross L.E., Li K.K., Udayakumar K., Micromachined high frequency ferroelectric sonar transducers. IEEE Trans. Ultrasonics Ferroelectrics Freq. Control. 44:1997;960-969.
4. Wooh S.-C., Shi Y., Influence of phased array element size on beam steering behavior. Ultrasonics. 36:1998;737-749.
5. Woo S.-C., Shi Y., Optimization of ultrasonic phased arrays. Rev. Prog. Quant. Nondestructive Eval. 1:1998;883-890.
6. Muralt P., Kholkin A., Kohli M., Maeder M., Piezoelectric actuator of PZT thin-film diaphragms at static and resonant conditions. Sens. Actuators A: Phys. 53:1996;398-404.
7. Young D., Vibration of rectangular plates by the Ritz method. J. Appl. Mech. 17:1950;448-453.