Electron density modulation in an asymmetric bipolar pulsed dc magnetron discharge

Journal of Applied Physics

Volumn 102, Issue 6, 2007, Pages

  Karkari, S K ^a   Ellingboe, A R ^a   Gaman, C ^a   Swindells, I ^b   Bradley, J W ^b  

^a DUBLIN CITY UNIVERSITY   (Ireland)

^b UNIVERSITY OF LIVERPOOL   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; ELECTRIC DISCHARGES; LIGHT MODULATION; MAGNETRON SPUTTERING; MICROWAVE IRRADIATION; PLASMA PROBES; TRACKING (POSITION);

ELECTRON DENSITY MODULATION; PLASMA ELECTRON DENSITY; PULSED MAGNETRON DISCHARGE; THERMAL SPEED;

PLASMA DENSITY;

EID: 34848815337     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2783980     Document Type: Article

References (32)

1. J. W. Bradley, S. K. Karkari, and A. Vetushka, Plasma Sources Sci. Technol. 13, 189 (2004).
2. H. Bartzsch, P. Frach, K. Goedicke, and Chr. Gottfried, Surf. Coat. Technol. 120-121, 723 (1999).
3. P. J. Kelly and R. D. Arnell, J. Vac. Sci. Technol. A 17, 945 (1999).
4. J. Musil, J. Leština, J. Vlček, and T. Tolg, J. Vac. Sci. Technol. A 19, 420 (2001).
5. S.-H. Seo, J.-H. In, and H.-Y. Chang, Appl. Phys. Lett. 86, 262103 (2005).
6. J. T. Gudmundsson, J. Alami, and U. Helmersson, Appl. Phys. Lett. 78, 3427 (2001).
7. J. T. Gudmundsson, J. Alami, and U. Helmersson, Surf. Coat. Technol. 161, 249 (2002).
8. V. Kouznetzov, K. Mac̀k, J. M. Schneider, U. Helmersson, and I. Petrov, Surf. Coat. Technol. 122, 290 (1999).
9. K. Mac̀k, V. Kouznetzov, J. M. Schnider, U. Helmersson, and I. Petrov, J. Vac. Sci. Technol. A 18, 1533 (2000).
10. S. Schiller, K. Goedicke, J. Reshke, V. Kirchhoff, S. Schneider, and F. Milde, Surf. Coat. Technol. 61, 331 (1993).
11. J. W. Bradley, G. C. B. Clarke, N. St. J. Braithwaite, P. M. Bryant, and P. J. Kelly, Plasma Sources Sci. Technol. 15, S44 (2006).
12. H. Bartzsch, D. GloΒ, B. Bocher, P. Frach, and K. Goedicke, Surf. Coat. Technol. 174-175, 774 (2003).
13. J. W. Bradley, H. Bäcker, P. J. Kelly, and R. D. Arnell, Surf. Coat. Technol. 135, 221 (2000).
14. J. W. Bradley, H. Bäcker, P. J. Kelly, and R. D. Arnell, Surf. Coat. Technol. 142-144, 337 (2001).
15. S. K. Karkari, A. Vetushka, and J. W. Bradley, J. Vac. Sci. Technol. A 21, L-28 (2003).
16. A. Vetushka, S. K. Karkari, and J. W. Bradley, J. Vac. Sci. Technol. A 22, 2459 (2004).
17. J. Lopez, W. Zhu, A. Freilich, A. Belkind, and K. Becker, J. Phys. D 38, 1769 (2005).
18. S. K. Karkari, H. Backer, D. Forder, and J. W. Bradley, Meas. Sci. Technol. 13, 1431 (2002).
19. M. Misina, J. W. Bradley, H. Backer, Y. Aranda-Gonzalvo, S. K. Karkari, and D. Forder, Vacuum 68, 171 (2003).
20. J. W. Bradley, H. Backer, Y. Aranda-Gonzalvo, P. J. Kelly, and R. D. Arnell, Plasma Sources Sci. Technol. 11, 165 (2002).
21. G. Ding, J. E. Scharer, and K. L. Kelly, J. Appl. Phys. 84, 1236 (1998).
22. F. Richter, T. Welzel, T. Dunger, and H. Kupfer, Surf. Eng. 20, 163 (2004).
23. S. Karkari and J. W. Bradley, Proceedings of the 48th Annual S.V.C. Technical Conference and Smart Materials Symposium, Colorado, 23-28 April, 2005, p. 491.
24. S. K. Karkari and A. R. Ellingboe, Appl. Phys. Lett. 88, 101501 (2006).
25. S. K. Karkari, C. Gaman, A. R. Ellingboe, I. Swindells, and J. W. Bradley, Meas. Sci. Technol. 18, 2649 (2007).
26. V. Milosavljević, S. K. Karkari, and A. R. Ellingboe, Plasma Sources Sci. Technol. 16, 304 (2007).
27. M. A. Lieberman and A. J. Lichtenberg, Principles of Plasma Discharges and Materials Processing, 1st ed., (Willey, New York, 1994).
28. R. L. Stenzel, Rev. Sci. Instrum. 47, 603 (1976).
29. R. B. Piejak, V. A. Godyak, R. Garner, B. M. Alexandrovich, and N. Sternberg, J. Appl. Phys. 95, 3785 (2004).
30. R. B. Piejak, J. Al-Kuzee, and A. St. Braithwaite, Plasma Sources Sci. Technol. 14, 734 (2005).
31. F. F. Chen, Introduction to Plasma Physics and Controlled Nuclear Fusion, (Plenum, New York, 1984), Vol. 1.
32. K. A. Lonngren M. Khazei, E. F. Gabl, and J. M. Bulson, Plasma Phys. 24, 1483 (1982).