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Volumn , Issue , 2005, Pages 491-494
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Time-resolved double probe measurements in a pulsed magnetron discharge
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Author keywords
Double probe; Electron temperature and density; Pulse magnetron deposition; Time resolved
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Indexed keywords
ELECTRIC DISCHARGES;
ELECTRONS;
THERMAL EFFECTS;
DOUBLE PROBE;
ELECTRON TEMPERATURE AND DENSITY;
PULSE MAGNETRON DEPOSITION;
TIME-RESOLVED;
MAGNETRONS;
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EID: 33644980762
PISSN: 07375921
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (1)
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References (7)
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