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Volumn , Issue , 2005, Pages 491-494

Time-resolved double probe measurements in a pulsed magnetron discharge

Author keywords

Double probe; Electron temperature and density; Pulse magnetron deposition; Time resolved

Indexed keywords

ELECTRIC DISCHARGES; ELECTRONS; THERMAL EFFECTS;

EID: 33644980762     PISSN: 07375921     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (1)

References (7)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.