Control of the structure and properties of aluminum oxide coatings deposited by pulsed magnetron sputtering

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 17, Issue 3, 1999, Pages 945-953

  Kelly, P J ^a   Arnell, R D ^a  

^a UNIVERSITY OF SALFORD   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 2142852262     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581669     Document Type: Article

References (26)

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