Experimental investigation on the dynamics of MEMS structures

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5455, Issue , 2004, Pages 66-73

  Rinaldi, Gino ^a   Packirisamy, Muthukumaran ^a   Stiharu, Ion ^a  

^a Dept of Electrical and Computer Engineering   (Canada)

Author keywords

Dynamic Characterization; Laser Doppler Velocimeter; MEMS; Vibrations

Indexed keywords

DESIGN FOR TESTABILITY; DOPPLER EFFECT; LASER DOPPLER VELOCIMETERS; MICROMACHINING; NATURAL FREQUENCIES; SENSORS; VELOCIMETERS;

DYNAMIC CHARACTERIZATION; LASER DYNAMIC CHARACTERIZATION (LDV); MECHANICAL EFFECTS;

MICROELECTROMECHANICAL DEVICES;

EID: 8844244894     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.547544     Document Type: Conference Paper

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