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Volumn 5970 I, Issue , 2005, Pages

Thermo-electrical influence on static and dynamic behaviour of cantilever type silicon waveguide

Author keywords

Electrostatic Influence; MEMS; Microcantilever; Thermal Load; Thermo Electric Coupling

Indexed keywords

EIGENVALUES AND EIGENFUNCTIONS; ELASTIC MODULI; SILICON; THERMOANALYSIS;

EID: 33244467678     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.628601     Document Type: Conference Paper
Times cited : (6)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.