Thermo-electrical influence on static and dynamic behaviour of cantilever type silicon waveguide

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5970 I, Issue , 2005, Pages

  Rinaldi, Gino ^a   Packirisamy, Muthukumaran ^a   Stiharu, Ion ^a  

^a Civil and Environmental Engineering   (Canada)

Author keywords

Electrostatic Influence; MEMS; Microcantilever; Thermal Load; Thermo Electric Coupling

Indexed keywords

EIGENVALUES AND EIGENFUNCTIONS; ELASTIC MODULI; SILICON; THERMOANALYSIS;

ELECTROSTATIC INFLUENCE; MICROCANTILEVERS; THERMAL LOADS; THERMO-ELECTRIC COUPLING;

OPTICAL WAVEGUIDES;

EID: 33244467678     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.628601     Document Type: Conference Paper

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