Boundary characterization of microstructures through thermo-mechanical testing

Journal of Micromechanics and Microengineering

Volumn 16, Issue 3, 2006, Pages 549-556

  Rinaldi, G ^a   Packirisamy, M ^a   Stiharu, I ^a  

^a Gina Cody School of Engineering and Computer Science   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; ETCHING; MICROELECTROMECHANICAL DEVICES; POLYNOMIALS; SILICON; THERMOMECHANICAL TREATMENT;

MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS); ORTHOGONAL POLYNOMIALS; RAYLEIGH-RITZ ENERGY METHOD; THERMO-MECHANICAL TESTING;

MICROSTRUCTURE;

EID: 33344466825     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/16/3/010     Document Type: Article

References (25)

1. Huang Y, Ergun A S, Hæggström E, Badi M H and Khuri-Yakub B T 2003 Fabricating capacitive micromachined ultrasonic transducers with wafer-bonding technology J. Microelectromech. Syst. 12 128-37
2. Liu R, Paden B and Turner K 2002 MEMS resonators that are robust to process-induced feature width variations J. Microelectromech. Syst. 11 505-11
3. Rinaldi G, Packirisamy M and Stiharu I 2004 An improved method for predicting microfabrication influence in atomic force microscopy performances Int. J. Nanotechnol. 1 292-306
4. Speller K E, Goldberg H, Gannon J and Lawrence E 2002 Unique MEMS characterization solutions enabled by laser Doppler vibrometer measurements Technical Paper Applied MEMS Inc, 12200 Parc Crest Drive, Stafford, TX, USA
5. Sader J E and White L 1993 Theoretical analysis of the static deflection of plates for atomic force microscope applications J. Appl. Phys. 74 1-9
6. Lévy R and Maaloum M 2002 Measuring the spring constant of atomic force microscope cantilevers: thermal fluctuations and other methods Nanotechnology 13 33-7
7. Hutter J L and Bechhoefer J 1994 Measurement and manipulation of van der Waals forces in atomic force microscopy J. Vac. Sci. Technol. B 12 2251-3
8. Sader J E, Larson I, Mulvaney P and White L R 1995 Method for the calibration of atomic force microscope cantilevers Rev. Sci. Instrum. 66 3789-98
9. Fettig H, Wylde J, Hubbard T and Kujath M 2001 Simulation, dynamic testing and design of micromachined flexible joints J. Micromech. Microeng. 11 209-16
10. Micralyne Inc. 1911 94th Street, Edmonton, Alberta, Canada T6N 1E6 www.micralyne.com
11. CMC Microsytems 210A Carruthers Hall, Queens's University, Kingston, Ontario, Canada K7L 3N6 www.cmc.ca
12. MikroMasch 9755 SW Commerce Cir, Suite B-1 Wilsonville, OR 97070, USA www.spmtips.com
13. Bhat R B 1985 Natural frequencies of rectangular plates using characteristic orthogonal polynomials in Rayleigh-Ritz method J. Sound Vib. 102 493-9
14. Lin T, Turner K and Zhang W 2003 Characterization of the mechanical properties of micro-electro-mechanical-system (MEMS) oscillators NNUN REU Program 110-111, Nanotech, Nanofabrication Facility, UC Santa Barbara, USA
15. Packirisamy M, Stiharu I and Bhat R B 2001 Application of boundary conditioning to the synthesis of microsystems Micro Electro Mechanical Systems Conf. (Berkeley, CA, 24-26 August) pp 83-6
16. Roberts R B 1981 Thermal expansion reference data: silicon 300-850 K J. Phys. D: Appl. Phys. 14 L163-6
17. Glazov V M and Pashinkin A S 2001 The thermal properties (heat capacity and thermal expansion) of single-crystal silicon High Temp. 39 413-9
18. Okaji M and Imai H 1984 A practical measurement system for the accurate determination of linear thermal expansion coefficients J. Phys. E: Sci. Instrum. 17 669-73
19. Watanabe H, Yamada N and Okaji M 2004 Linear thermal expansion coefficient of silicon from 293 to 1000 K Int. J. Thermophys. 25 221-36
20. Ono N, Kitamura K, Nakajima K and Shimanuki Y 2000 Measurement of Young's modulus of silicon single crystal at high temperature and its dependency on boron concentration using the flexural vibration method Japan. J. Appl. Phys. 39 368-71
21. Han J, Zhu C, Liu J and He Y 2002 Dependence of the resonance frequency of thermally excited microcantilever resonators on temperature Sensors Actuators A 101 37-41
22. Fujii K, Waseda A and Kuramoto N 2001 Development of a silicon density standard and precision density measurements of solid materials by hydrostatic weighing Meas. Sci. Technol. 12 2031-8
23. Packirisamy M, Stiharu I and Bhat R B 2005 Influence of micromachining on dynamic behaviour of MEMS structures Can. J. Electr. Comput. Eng. 30 157-62
24. Rinaldi G, Packirisamy M and Stiharu I 2004 Experimental investigation on the dynamics of MEMS structures Proc. SPIE (Photonics Europe, Strasbourg, France, 26-30 April)
25. Rinaldi G, Packirisamy M and Stiharu I 2004 Optical MEMS based bimorph for thermal sensing Proc SPIE (Photonics North, Ottawa, Canada, 26-29 September)