An improved method for predicting microfabrication influence in atomic force microscopy performances

International Journal of Nanotechnology

Volumn 1, Issue 3, 2004, Pages 292-306

  Rinaldi, Gino ^a   Packirisamy, Muthukumaran ^a   Stiharu, Ion ^a  

^a Gina Cody School of Engineering and Computer Science   (Canada)

Author keywords

AFM cantilevers; Boundary characteristic orthogonal polynomials; Boundary conditioning; MEMS; Microfabrication; Micromechanical structures; Rayleigh Ritz; Vibrations

Indexed keywords

ATOMIC FORCE MICROSCOPY; BOUNDARY CONDITIONS; COMPOSITE MICROMECHANICS; MATHEMATICAL MODELS; MECHANICAL ENGINEERING; MICROELECTROMECHANICAL DEVICES; MODAL ANALYSIS; POLYNOMIALS; SPRINGS (COMPONENTS); STIFFNESS; VIBRATIONS (MECHANICAL);

AFM CANTILEVERS; BOUNDARY CHARACTERISTIC ORTHOGONAL POLYNOMIALS; BOUNDARY CONDITIONING; MEMS; MICROFABRICATION; MICROMECHANICAL STRUCTURES; RAYLEIGH-RITZ;

CANTILEVER BEAMS;

EID: 3843050167     PISSN: 14757435     EISSN: None     Source Type: Journal    
DOI: 10.1504/IJNT.2004.004911     Document Type: Conference Paper

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