The role of backscattered energetic atoms in film growth in reactive magnetron sputtering of chromium nitride

Journal of Physics D: Applied Physics

Volumn 40, Issue 3, 2007, Pages 778-785

  Sarakinos, K ^a   Alami, J ^a   Karimi, P M ^a   Severin, D ^a   Wuttig, M ^a  

^a RWTH AACHEN UNIVERSITY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

BACKSCATTERING; CHROMIUM COMPOUNDS; MAGNETRON SPUTTERING; SPUTTERING;

BACKSCATTERED ENERGETIC ATOMS; CHROMIUM NITRIDE; PLASMA IONS; TARGET DISCHARGE FILM INTERACTIONS;

FILM GROWTH;

EID: 33947612576     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/40/3/014     Document Type: Article

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