Generation and evolution of residual stresses in physical vapour-deposited thin films

Vacuum

Volumn 61, Issue 2-4, 2001, Pages 175-181

  Pauleau, Y ^a  

^a GRENOBLE INSTITUTE OF TECHNOLOGY   (France)

Author keywords

Evaporation; Modelling; Residual stresses; Sputtering; Thin films

Indexed keywords

COMPRESSIVE STRESS; EVAPORATION; MAGNETRON SPUTTERING; PHYSICAL VAPOR DEPOSITION; POROUS MATERIALS; SPUTTER DEPOSITION; STRESS ANALYSIS; TENSILE STRESS; THERMAL STRESS; THIN FILMS; VAPORS;

EXTRINSIC STRESSES; INTRINSIC STRESSES;

RESIDUAL STRESSES;

EID: 0035858440     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(00)00475-9     Document Type: Conference Paper

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