Growth of single-crystal CrN on MgO(001): Effects of low-energy ion-irradiation on surface morphological evolution and physical properties

Journal of Applied Physics

Volumn 91, Issue 6, 2002, Pages 3589-3597

  Gall, D ^a   Shin, C S ^a   Spila, T ^a   Oden M ^b   Senna, M J H ^a   Greene, J E ^a   Petrov, I ^a  

^a University of Illinois at Urbana Champaign   (United States)

^b LINKÖPING UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

ADATOM MOBILITIES; ATOMIC SHADOWING; CORRELATION LENGTHS; FLUX RATIO; GROWTH DIRECTIONS; HIGHER TEMPERATURES; ION ENERGIES; KINETIC ROUGHENING; LOW ENERGIES; MGO; MORPHOLOGICAL EVOLUTION; NANOPIPES; POLYCRYSTALLINE FILM; ROOM-TEMPERATURE RESISTIVITY; UNBALANCED MAGNETRON SPUTTER DEPOSITION;

ADATOMS; DESORPTION; EPITAXIAL GROWTH; SINGLE CRYSTALS;

CHROMIUM;

EID: 0037087275     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1446239     Document Type: Article

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