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Volumn 96, Issue 2-3, 1997, Pages 323-329
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Properties of reactively RF magnetron-sputtered chromium nitride coatings
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Author keywords
Chromium nitride; Hard coatings; Magnetron reactive sputtering; Thin film
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Indexed keywords
ARGON;
CATHODIC PROTECTION;
HARDNESS;
MAGNETRON SPUTTERING;
MORPHOLOGY;
NITROGEN;
PROTECTIVE COATINGS;
SPUTTER DEPOSITION;
THIN FILMS;
WEAR RESISTANCE;
CHROMIUM NITRIDE;
HARD COATINGS;
MAGNETRON REACTIVE SPUTTERING;
CHROMIUM COMPOUNDS;
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EID: 0031272752
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/S0257-8972(97)00184-9 Document Type: Article |
Times cited : (98)
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References (20)
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