Nitrogen atom energy distributions in a hollow-cathode planar sputtering magnetron

Physical Review E - Statistical Physics, Plasmas, Fluids, and Related Interdisciplinary Topics

Volumn 61, Issue 2, 2000, Pages 1904-1911

  Wang, Zhehui ^a   Cohen, Samuel A ^b   Ruzic, David N ^c   Goeckner, M J ^d  

^a LOS ALAMOS NATIONAL LABORATORY   (United States)

^b PRINCETON PLASMA PHYSICS LABORATORY   (United States)

^c University of Illinois at Urbana Champaign   (United States)

^d UNIVERSITY OF TEXAS AT DALLAS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMS; CATHODES; DECONVOLUTION; ELECTRIC POWER DISTRIBUTION; ELECTRON SOURCES; EMISSION SPECTROSCOPY; MAGNETRONS; OPTICAL EMISSION SPECTROSCOPY;

CHARACTERISTIC LINES; COMPUTER CODES; ENERGY DISTRIBUTIONS; HOLLOW CATHODES; MOLECULAR NITROGEN; NITROGEN ATOM; SPECTRAL DECONVOLUTION;

NITROGEN;

EID: 5244317243     PISSN: 1063651X     EISSN: None     Source Type: Journal    
DOI: 10.1103/PhysRevE.61.1904     Document Type: Article

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