A study of LAO nanopatterns on Si substrates of different crystallographic orientations

Solid State Communications

Volumn 142, Issue 1-2, 2007, Pages 89-93

  Vijaykumar, T ^a   Kulkarni, G U ^a  

^a DST Unit on Nanoscience   (India)

Author keywords

A. Silicon surfaces; B. Local anodic oxidation; C. Atomic force microscopy

Indexed keywords

ANODIC OXIDATION; ATOMIC FORCE MICROSCOPY; CRYSTAL ORIENTATION; CRYSTALLOGRAPHY; HARDNESS;

LOCAL ANODIC OXIDATION (LOA); OXIDE NANOPATTERNS; SILICON SURFACES; TIP VOLTAGE;

NANOPARTICLES;

EID: 33847636139     PISSN: 00381098     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ssc.2007.01.027     Document Type: Article

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