Nanometer scale lithography of silicon(100) surfaces using tapping mode atomic force microscopy

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 14, Issue 3, 1996, Pages 1208-1212

  Servat, J ^a   Gorostiza, P ^a   Sanz, F ^a   Perez Murano F ^b   Barniol, N ^b   Abadal, G ^b   Aymerich, X ^b  

^a UNIVERSITY OF BARCELONA   (Spain)

^b UNIVERSITAT AUTÒNOMA DE BARCELONA   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 5844422033     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580268     Document Type: Article

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