Fabrication of support structures to prevent SU-8 stiction in high aspect ratio structures

Microsystem Technologies

Volumn 13, Issue 5-6, 2007, Pages 487-493

  Vora, K D ^a   Peele, A G ^a   Shew, B Y ^b   Harvey, E C ^c   Hayes, J P ^c  

^a LA TROBE UNIVERSITY   (Australia)

^b NATIONAL SYNCHROTRON RADIATION RESEARCH CENTER   (Taiwan)

^c SWINBURNE UNIVERSITY OF TECHNOLOGY   (Australia)

Author keywords

Deep X ray lithography; Densely packed high aspect ratio structures; Stiction

Indexed keywords

CAPILLARITY; LITHOGRAPHY; PLATES (STRUCTURAL COMPONENTS); STICTION; X RAY ANALYSIS;

DEEP X-RAY LITHOGRAPHY; DENSELY PACKED HIGH ASPECT RATIO STRUCTURES; TOP-PLATE STRUCTURES;

ASPECT RATIO;

EID: 33847271606     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-006-0201-4     Document Type: Article

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