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Volumn 9, Issue 1-2, 2003, Pages 55-60

Production issues for high aspect ratio Lobster-eye optics using LIGA

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; ASPECT RATIO; GRAPHITE; LIGHT REFLECTION; NICKEL; OPTICAL RESOLVING POWER; OPTICAL TELESCOPES; PLASTIC DEFORMATION; POROSITY; RELAXATION PROCESSES; SUBSTRATES; X RAYS;

EID: 17444431624     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-002-0196-4     Document Type: Article
Times cited : (9)

References (19)
  • 1
    • 0000339228 scopus 로고
    • Lobster eyes as X-ray telescopes
    • Angel JRP (1979) Lobster eyes as X-ray telescopes. Astrophys J 233: 364-373
    • (1979) Astrophys J , vol.233 , pp. 364-373
    • Angel, J.R.P.1
  • 6
    • 36449003136 scopus 로고
    • X-ray focusing using square channel capillary arrays
    • Chapman HN; Nugent KA; Wilkins SW (1991) X-ray focusing using square channel capillary arrays. Rev Sci Instrum 62: 1542-1561
    • (1991) Rev Sci Instrum , vol.62 , pp. 1542-1561
    • Chapman, H.N.1    Nugent, K.A.2    Wilkins, S.W.3
  • 7
    • 0031382524 scopus 로고    scopus 로고
    • Calculational and experimental determination of the structure transfer accuracy in deep X-ray lithography
    • Feiertag G; Ehrfeld W; Lehr H; Schmidt A; Schmidt M (1997) Calculational and experimental determination of the structure transfer accuracy in deep X-ray lithography. J Micromech Microeng 7: 323-331
    • (1997) J Micromech Microeng , vol.7 , pp. 323-331
    • Feiertag, G.1    Ehrfeld, W.2    Lehr, H.3    Schmidt, A.4    Schmidt, M.5
  • 9
    • 0033353368 scopus 로고    scopus 로고
    • The influence of feature sidewall tolerance on minimum absorber thickness for LIGA X-ray masks
    • Griffiths SK; Hruby JM; Ting A (1999) The influence of feature sidewall tolerance on minimum absorber thickness for LIGA X-ray masks. I Micromech Microeng 9: 353-361
    • (1999) I Micromech Microeng , vol.9 , pp. 353-361
    • Griffiths, S.K.1    Hruby, J.M.2    Ting, A.3
  • 16
    • 0010998957 scopus 로고    scopus 로고
    • Lobster-eye all-sky monitors: A comparison of one- And two-dimensional designs
    • Peele A; Zhang W (1998) Lobster-eye all-sky monitors: a comparison of one- and two-dimensional designs. Rev Sci Instrum 69: 2785-2793
    • (1998) Rev Sci Instrum , vol.69 , pp. 2785-2793
    • Peele, A.1    Zhang, W.2
  • 19
    • 0031164640 scopus 로고    scopus 로고
    • Simulational studies of energy deposition and secondary processes in deep X-ray lithography
    • Zumaqué H; Kohring GA; Hormes J (1999) Simulational studies of energy deposition and secondary processes in deep X-ray lithography. J Micromech Microeng 7: 79-88
    • (1999) J Micromech Microeng , vol.7 , pp. 79-88
    • Zumaqué, H.1    Kohring, G.A.2    Hormes, J.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.