Microfabrication of massive parallel micromirror-lenses by X-ray LIGA technique: Recent advances and prospects

Microsystem Technologies

Volumn 10, Issue 1, 2003, Pages 22-28

  Kupka, R ^a   Bouamrane, F ^a   Megtert, S ^a  

^a UNIVERSITÉ PARIS SACLAY   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; LIGHT REFLECTION; MICROOPTICS; MIRRORS; TWO DIMENSIONAL; WAVEFRONTS; X RAYS;

FRESNEL LENS; FRESNEL ZONE PLATE; MICROFABRICATION; MICROMIRROR; X RAY LIGA;

OPTICAL INSTRUMENT LENSES;

EID: 0742286284     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-002-0225-3     Document Type: Article

References (28)

1. Allman BE; Cimmino A; Griffin SL; Klein AG; Nugent KA; Anderson IS; Hoghoj P; Peele AG (1998) Focusing neutrons with a "Lobster-eye" optic [and application to soft X-rays. Proc SPIE 3449: 165-174
2. Angel JRP (1979) Lobster eyes as X-ray telescopes. Proc SPIE 184: 84-85
3. Arkadiev VA; Bzhaumikhov; Aniuar A (1995) X-ray focusing by polycapillary arrays. Proc SPIE 2515: 514-525
4. Cimmino A; Allman BE; Brumby SP; Irving THK; Kelin AG; Nugent KA; Anderson IS; Hoghoj P; Peele AG (1998) Square micro-channel arrays for focussing neutrons and X-rays. Proc SPIE 3511: 393-400
5. Cross P; Nevot L (1976) Etude des couches minces et des surfaces par réflexion rasante, spéculaire ou diffuse, de rayons-X. Revue de physique apliquée 11: 113-125.
6. Gorenstein P (1993) Non-traditional grazing incidence optics for X-ray astronomy. Proc SPIE 1736: 201-211
7. Gorenstein P; Whitbeck E; Austin G; Kenter A; Pina L; Hudec R (1996) A lobster eye X-ray telescope prototype. Proc SPIE 2805; 74-80
8. Henke BL; Gullikson EM; Davis JC (1993) X-ray interactions: photoabsorption, scattering, transmission, and reflection at E = 50-30,000 eV, Z = 1-92. Atomic Data and Nuclear Data Tables 54(2): 181-342
9. Hudec R; Pina L; Inneman A; Gorenstein P; Rezek T (1999) Wide field X-ray telescopes: detecting X-ray transients/afterglows related to gamma ray bursts. Nuclear-Phys-B,-Proc Suppl 69 (1-3): 716-719
10. Kupka RK; Roulliay M; Bouamrane F; Megtert S (1998) Modern VUV and X-ray optics. LIGA fabricated and micromachined devices. Proc SPIE 3512: 398-409
11. Kupka RK; Bouamrane F; Roulliay M; Megtert S (1999) X-ray transmission lenses by deep X-ray lithography and LIGA technology: first results and fundamental limits. Proc SPIE 3680: 508-517
12. Kupka RK; Bouamrane F; Cremers C; Megtert S (2000) Micro-fabrication: LIGA-X and applications. Appl Surf Sci 164: 97-110
13. Lees JE; Pearson JF (1997) A large area MCP detector for X-ray imaging. Nucl instru & meth Phys res Sect A 384(2-3): 410-424
14. Peele AG; Nugent KA; Rode AV; Gabel K; Richardson MC; Strack R; Siegmund W (1996) X-ray focusing with lobster-eye optics: a comparison of theory and experiment. Appl Opt 35(22): 4420-4425
15. Peele A; Zhang W (1998) Lobster-eye all-sky monitors: a comparison of one- and two-dimensional designs. Rev scientific instru 69(7): 2785-2793
16. Peele AG; Nugent KA (1998) Lobster eye X-ray optics: a rapid evaluation of the image distribution. Appl Opt 37(4): 632-642
17. Peele AG (1999) Instrumentation for a next-generation X-ray all-sky monitor. AIP Conf Proc 499: 135-145
18. Peele AG; Zhang W; Gendreau KC; Petre R; White NE (1999) A lobster-eye on the X-ray sky. AIP Conf Proc 458(1): 170-175
19. Peele AG (1999) Investigation of etched silicon wafers for lobster-eye optics. Rev Scientific Instru 70(2): 1268-1273
20. Peele AG (2001) Deconvolution of an extended object viewed by a lobster-eye telescope. Nucl instru & meth phys res Sect A 459 (1-2): 354-364
21. Peele AG; Irving THK; Nugent KA; Mancini DC; Christenson TR; Petre R; Brumby SP; Priedhorsky WC (2001) LIGA for lobster: first observation of lobster-eye focusing from lithographically produced optics. rev scientific instru 72(3): 1843-1849
22. Priedhorsky WC; Christensen FE (1995) A novel wide-field hard X-ray telescope. Experimental Astronomy 6(1-2): 129-142
23. Priedhorsky WC; Peele AG; Nugent KA (1996) An X-ray all-sky monitor with extraordinary sensitivity. Monthly Notices of the Royal Astronomical Society 279(3): 733-750
24. Priedhorsky WC; Peele AG; Nugent KA (1997) Next generation X-ray all sky monitor. AIP Conf Proc 487(1): 19-24
25. Schmidt WKH (1975) A Proposed X-ray focussing device with wide field of view for use in X-ray astronomy. Nucl Instrum Meth 127: 285-292
26. Schmidt-WKH (1981) Wide angle X-ray optics for use in astronomy. Space Science Rev 30(1-4): 615-621
27. Willingale R; Fraser GW; Brunton AN; Martin AP (1998) Hard X-ray imaging with microchannel plate optics. Experimental Astronomy 8(4): 281-296
28. Willingdale R (1999) New Developments in X-ray optics, X-ray Spectroscopy in Astrophysics. Springer, Berlin Germany, pp. 435-475