Proton beam micromachining dose normalization for SU-8 using ionoluminescence detection

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 210, Issue , 2003, Pages 256-259

  Udalagama, Chammika N B ^a   Bettiol, Andrew A ^a   Van Kan, J A ^a   Watt, Frank ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

Dose normalization; Ionoluminescence; Proton beam micromachining; SU 8

Indexed keywords

ASPECT RATIO; DOSIMETRY; LITHOGRAPHY; LUMINESCENCE; PHOTONS; PHOTORESISTS; POLYMETHYL METHACRYLATES; PROTON BEAMS; PROTON IRRADIATION;

DOSE NORMALIZATION; IONOLUMINESCENCE;

MICROMACHINING;

EID: 0042513864     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(03)01023-1     Document Type: Conference Paper

References (8)

1. Watt F. Nucl. Instr. and Meth. B. 158:1999;165.
2. Bettiol A.A., van Kan J.A., Sum T.C., Watt F. Nucl. Instr. and Meth. B. 181:2001;49.
3. van Kan J.A., Bettiol A.A., Watt F. Nucl. Instr. and Meth. B. 181:2001;258.
4. Quaranta A., Vomiero A., Carturan S., Maggioni G., Della Mea G. Nucl. Instr. and Meth. B. 191(1-4):2002;680.
5. Birks J.B. Scintillating Counters. 1953;McGraw-Hill Book Co., Inc., Pergamon Press Ltd. New York, London.
6. Shaw J.M., Gelorme J.D., LaBianca N.C., Conley W.E., Holmes S.J. IBM J. Res. Dev. 41:1997;81.
7. Bettiol A.A., Rajta I., Teo E.J., van Kan J.A., Watt F. Nucl. Instr. and Meth. B. 190(1-4):2002;154.
8. M. Mayer, SIMNRA User's Guide, Technical Report IPP9/113, Max Planck Institut fur Plasmaphysik, Garching, Germany, 1997.