Fabrication of collimators for gamma-ray imaging

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5539, Issue , 2004, Pages 126-132

  Makarova, Olga V ^a   Yang, Guohua ^a   Tang, Cha Mei ^a   Mancini, Derrick C ^b   Divan, Ralu ^b   Yaeger, Judith ^b  

^a CREATV MICROTECH INC   (United States)

^b ARGONNE NATIONAL LABORATORY   (United States)

Author keywords

Collimator; Deep x ray lithography; Gold plating; High aspect ratio; LIGA; SU 8

Indexed keywords

ASPECT RATIO; ELECTROFORMING; GAMMA RAYS; IMAGING SYSTEMS; PHOTORESISTS; SCANNING ELECTRON MICROSCOPY; SURFACE TREATMENT; X RAY LITHOGRAPHY;

GAMMA CAMERAS; HIGH RESOLUTION COLLIMATORS; SINGLE PHOTON EMISSION COMPUTED TOMOGRAPHY (SPECT); SU-8;

OPTICAL COLLIMATORS;

EID: 15844396413     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.563748     Document Type: Conference Paper

References (12)

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