Deep x‐ray lithography for micromechanics and precision engineering (invited)

Review of Scientific Instruments

Volumn 67, Issue 9, 1996, Pages 3357-

  Guckel, Henry ^a  

^a University of Wisconsin Madison   (United States)

Author keywords

ACTUATORS; ENGINEERING; FABRICATION; MACHINING; MANUFACTURING; MICROELECTRONICS; PMMA; SYNCHROTRON RADIATION SOURCES; USES; X RAY SOURCES

Indexed keywords

EID: 85024805910     PISSN: 00346748     EISSN: 10897623     Source Type: Journal    
DOI: 10.1063/1.1147379     Document Type: Conference Paper

References (0)