Effect of N2/CH4 flow ratio on microstructure and composition of hydrogenated carbon nitride films prepared by a dual DC-RF plasma system

Journal of Non-Crystalline Solids

Volumn 353, Issue 2, 2007, Pages 136-142

  Hao, Junying ^a   Liu, Weimin ^a   Xue, Qunji ^a  

^a LANZHOU INSTITUTE OF CHEMICAL PHYSICS   (China)

Author keywords

Chemical vapor deposition; Films and coatings; FTIR measurements; Hardness; Indentation; Microindentation; Microstructure; Plasma deposition; Vapor phase deposition; XPS

Indexed keywords

CARBON NITRIDE; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HARDNESS; HYDROGENATION; INDENTATION; MICROSTRUCTURE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

FILMS AND COATINGS; MICROINDENTATION; PLASMA DEPOSITION; VAPOR PHASE DEPOSITION;

NITROGEN COMPOUNDS;

EID: 33845696827     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jnoncrysol.2006.10.008     Document Type: Article

References (42)

1. Liu A.Y., and Cohen M.L. Science 245 (1989) 841
2. Liu A.Y., and Cohen M.L. Phys. Rev. B 41 (1990) 10727
3. Liu A.Y., and Wentzcovitch R.M. Phys. Rev. B 50 (1994) 10362
4. Alba de Sanchez N., Carrasco C., and Prieto P. Physica B 337 (2003) 318
5. Fernández A., Ternández-Ramos C., and Sánchez-López J.C. Surf. Coat. Technol. 163&164 (2003) 527
6. López S., Dunlop H.M., Benmalek M., Tourillon G., Wong M.-S., and Sproul W.D. Surf. Interface Anal. 25 (1997) 315
7. Okada T., Yamada S., Takeuchi Y., and Wada T. J. Appl. Phys. 78 (1995) 7416
8. Ogata K., Chubaci J.F.D., and Fujimoto F. J. Appl. Phys. 76 (1994) 3791
9. Meskinis S., Andrulevicius M., Kopustinskas V., and Tamulevicius S. Appl. Surf. Sci. 249 (2005) 295
10. Boyd K.J., Marton D., Todorov S.S., Al-Bayati A.H., Kulik J., Zuhr R.A., and Rabdais J.W. J. Vac. Sci. Technol. A 13 (1995) 2110
11. Bhattacharyya S., Vallée C., Cardinaud C., et al. J. Appl. Phys. 85 (1999) 2162
12. Égerházi L., Geretovszky Zs., and Szörényi T. Appl. Surf. Sci. 247 (2005) 182
13. Szörényi T., and Fogarassy E. Appl. Surf. Sci. 208&209 (2003) 502
14. Zhou Z.M., and Xia L.F. J. Phys. D: Appl. Phys. 35 (2002) 1991
15. Cheng Y.H., Tay B.K., Lau S.P., Shi X., Qiao X.L., Chen J.G., Wu Y.P., and Xie C.S. Appl. Phys. A: Mater. Sci. Process. 73 (2001) 341
16. Motta E.F., and Pereyra I. J. Non-Cryst. Solids 338-340 (2004) 525
17. Rusop M., Omer A.M.M., Adhikari S., Adhikary S., Uchida H., Soga T., Jimbo T., and Umeno M. Diam. Relat. Mater. 14 (2005) 975
18. Wei B., Zhang B., and Johnson K.E. J. Appl. Phys. 83 (1998) 2491
19. Lu W., and Komvopoulos K. J. Appl. Phys. 85 (1999) 2642
20. Zhou Z.M., and Xia L.F. Surf. Coat. Technol. 172 (2003) 102
21. Hao J.Y., Xu T., and Liu W.M. J. Non-Cryst. Solids 351 (2005) 3671
22. Hao J.Y., Xu T., and Liu W.M. Mater. Sci. Eng. A 408 (2005) 297
23. Rodil S.E., Morrison N.A., Robertson J., and Milne W.I. Phys. Status Solidi A 174 (1999) 25
24. Vilcarromeno J., Carreño M.N.P., and Pereyra I. Thin Solids Films 373 (2000) 273
25. Inoue T., Ohshio S., Saitoh H., and Kamata K. Appl. Phys. Lett. 67 (1995) 353
26. Mubumbila N., Tessier P.-Y., Angleraud B., and Turban G. Surf. Coat. Technol. 151&152 (2002) 175
27. Catherine Y. Diamond and diamond-like films. In: Clausing R.E. (Ed). NATO Advance Study Institute, Ser. B vol. 266 (1991), Plenum, New York 193
28. Shi J.R., Wang J.P., Wee A.T.S., Yeo C.B., Cheng C.T., Ueda M., Tomioka S., and Ohsako J. J. Appl. Phys. 92 10 (2002) 5966
29. Roy S.S., McCann R., Papakonstantinou P., Maguire P., and McLaughlin J.A. Thin Solids Films 482 (2005) 145
30. Papakonstantinou P., and Lemoine P. J. Phys. Condens. Mat. 13 (2001) 2971
31. Merel P., Tabbal M., Chaker M., Moisa S., and Margot J. Appl. Surf. Sci. 136 (1998) 105
32. Hellgren N., Guo J., Sathe C., Agui A., Nordgren J., Luo Y., Agren H., and Sundgren J. Appl. Phys. Lett. 79 (2001) 4348
33. Das D., Chen K.H., Chattopadhyay S., and Chen L.C. J. Appl. Phys. 91 (2002) 4944
34. Roy S.S., Papakonstantinou P., McCann R., McLaughlin J., Klini A., and Papadogiannis N. Appl. Phys. A 79 (2004) 1009
35. Kaufman J.H., Metin S., and Saperstein D.D. Phys. Rev. B 39 (1989) 13053
36. Liu Y., Jiaa C., and Do H. Surf. Coat. Technol. 115 (1999) 95
37. Mutsukura N., and Daigo Y. Diam. Relat. Mater. 12 (2003) 2057
38. Kurt R., Sanjines R., Karimi A., and Lévy F. Diam. Relat. Mater. 9 (2000) 566
39. Ng Y.M., Ong C.W., Zhao X.A., and Choy C.L. J. Vac. Sci. Technol. A 17 (1999) 584
40. Heitz T., Drevillon B., Godet C., and Bouree J.E. Phys. Rev. B 58 (1998) 13957
41. Kusano Y., Barber Z.H., Evetts J.E., and Hutchings I.M. Surf. Coat. Technol. 124 (2000) 104
42. Taki Y., and Takai O. Thin Solid Films 316 (1998) 45