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Volumn 351, Issue 49-51, 2005, Pages 3671-3676

Effect of deposition pressure on microstructure and properties of hydrogenated carbon nitride films prepared by DC-RF-PECVD

(3) Hao, Junying a,b Xu, Tao a Liu, Weimin a

a LANZHOU INSTITUTE OF CHEMICAL PHYSICS (China)

b UNIVERSITY OF CHINESE ACADEMY OF SCIENCES (China)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON NITRIDE; CHEMICAL BONDS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; GROWTH (MATERIALS); HYDROGENATION; MICROSTRUCTURE; PHASE COMPOSITION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SEMICONDUCTING SILICON; X RAY PHOTOELECTRON SPECTROSCOPY;

BONDING STRUCTURES; DEPOSITION PRESSURE; GROWTH RATES;

THIN FILMS;

EID: 27944480044 PISSN: 00223093 EISSN: None Source Type: Journal
DOI: 10.1016/j.jnoncrysol.2005.10.013 Document Type: Article

Times cited : (23)

References (37)

1
- 20444373328
- A.Y. Liu, and M.L. Cohen Science 245 1989 841
- (1989) Science , vol.245 , pp. 841
- Liu, A.Y.¹ Cohen, M.L.²

2
- 0042059097
- A.Y. Liu, and M.L. Cohen Phys. Rev. B 41 1990 10727
- (1990) Phys. Rev. B , vol.41 , pp. 10727
- Liu, A.Y.¹ Cohen, M.L.²

3
- 0000286107
- A.Y. Liu, and R.M. Wentzcovitch Phys. Rev. B 50 1994 10362
- (1994) Phys. Rev. B , vol.50 , pp. 10362
- Liu, A.Y.¹ Wentzcovitch, R.M.²

4
- 0031139890
- S. López, H.M. Dunlop, M. Benmalek, G. Tourillon, M.-S. Wong, and W.D. Sproul Surf. Interf. Anal. 25 1997 315
- (1997) Surf. Interf. Anal. , vol.25 , pp. 315
- López, S.¹ Dunlop, H.M.² Benmalek, M.³ Tourillon, G.⁴ Wong, M.-S.⁵ Sproul, W.D.⁶

5
- 0030538517
- H. Sjöström, L. Hultman, J.-E. Sundgren, S.V. Hainsworth, T.F. Page, and G.S.A.M. Theunissen J. Vac. Sci. Technol. A 14 1996 56
- (1996) J. Vac. Sci. Technol. A , vol.14 , pp. 56
- Sjöström, H.¹ Hultman, L.² Sundgren, J.-E.³ Hainsworth, S.V.⁴ Page, T.F.⁵ Theunissen, G.S.A.M.⁶

6
- 0000070523
- T. Okada, S. Yamada, Y. Takeuchi, and T. Wada J. Appl. Phys. 78 1995 7416
- (1995) J. Appl. Phys. , vol.78 , pp. 7416
- Okada, T.¹ Yamada, S.² Takeuchi, Y.³ Wada, T.⁴

7
- 0030415484
- P. Hammer, M.A. Baker, C. Lenardi, and W. Gissler Thin Solid Films 290-291 1996 107
- (1996) Thin Solid Films , vol.290-291 , pp. 107
- Hammer, P.¹ Baker, M.A.² Lenardi, C.³ Gissler, W.⁴

8
- 21544470322
- K. Ogata, J.F.D. Chubaci, and F. Fujimoto J. Appl. Phys. 76 1994 3791
- (1994) J. Appl. Phys. , vol.76 , pp. 3791
- Ogata, K.¹ Chubaci, J.F.D.² Fujimoto, F.³

9
- 84956208397
- F. Fujimoto, and K. Ogata Jpn. J. Appl. Phys. 32 1993 L420
- (1993) Jpn. J. Appl. Phys. , vol.32
- Fujimoto, F.¹ Ogata, K.²

10
- 84907009269
- K.J. Boyd, D. Marton, S.S. Todorov, A.H. Al-Bayati, J. Kulik, R.A. Zuhr, and J.W. Rabdais J. Vac. Sci. Technol. A 13 1995 2110
- (1995) J. Vac. Sci. Technol. A , vol.13 , pp. 2110
- Boyd, K.J.¹ Marton, D.² Todorov, S.S.³ Al-Bayati, A.H.⁴ Kulik, J.⁵ Zuhr, R.A.⁶ Rabdais, J.W.⁷

11
- 0000923081
- S. Bhattacharyya, C. Vallee, and C. Cardinaud J. Appl. Phys. 85 1999 2126
- (1999) J. Appl. Phys. , vol.85 , pp. 2126
- Bhattacharyya, S.¹ Vallee, C.² Cardinaud, C.³

12
- 21844509437
- A. Bousetta, M. Lu, and A. Bansaoula J. Vac. Sci. Technol. A 13 1995 1639
- (1995) J. Vac. Sci. Technol. A , vol.13 , pp. 1639
- Bousetta, A.¹ Lu, M.² Bansaoula, A.³

13
- 0032594130
- F. Černý, J. Guroviè, I. Hüttel, J. Suchnek, A. Djouadi, and V. Hnatowicz Diam. Relat. Mater. 8 1999 1730
- (1999) Diam. Relat. Mater. , vol.8 , pp. 1730
- Černý, F.¹ Guroviè, J.² Hüttel, I.³ Suchnek, J.⁴ Djouadi, A.⁵ Hnatowicz, V.⁶

14
- 2942590535
- E.F. Motta, and I. Pereyra J. Non-Cryst. Solids 338-340 2004 525
- (2004) J. Non-Cryst. Solids , vol.338-340 , pp. 525
- Motta, E.F.¹ Pereyra, I.²

15
- 0029342628
- I. Gouzman, R. Brener, and A. Hoffman Surf. Sci. 331-333 1995 283
- (1995) Surf. Sci. , vol.331-333 , pp. 283
- Gouzman, I.¹ Brener, R.² Hoffman, A.³

16
- 0000826562
- D.-H. Lee, H. Lee, and B. Park Appl. Phys. Lett. 23 1997 3104
- (1997) Appl. Phys. Lett. , vol.23 , pp. 3104
- Lee, D.-H.¹ Lee, H.² Park, B.³

17
- 0032098116
- A. Wei, D. Chen, and N. Ke Thin Solid Films 323 1998 217
- (1998) Thin Solid Films , vol.323 , pp. 217
- Wei, A.¹ Chen, D.² Ke, N.³

18
- 0001516066
- L.K. Cheah, X. Shi, and E. Liu Appl. Phys. Lett. 73 1998 2473
- (1998) Appl. Phys. Lett. , vol.73 , pp. 2473
- Cheah, L.K.¹ Shi, X.² Liu, E.³

19
- 0031248001
- A.P. Caricato, G. Leggier, and A. Luches Thin Solid Films 307 1997 54
- (1997) Thin Solid Films , vol.307 , pp. 54
- Caricato, A.P.¹ Leggier, G.² Luches, A.³

20
- 0031553490
- J. Bulir, M. Jelinek, and V. Vorlicek Thin Solid Films 292 1997 318
- (1997) Thin Solid Films , vol.292 , pp. 318
- Bulir, J.¹ Jelinek, M.² Vorlicek, V.³

21
- 0031557375
- N.K. Xu, D.C. Yin, Z.T. Liu, and X.L. Zheng J. Phys. D 30 1997 763
- (1997) J. Phys. D , vol.30 , pp. 763
- Xu, N.K.¹ Yin, D.C.² Liu, Z.T.³ Zheng, X.L.⁴

22
- 0036641622
- Y. Mokuno, A. Chayahara, Y. Horino, and Y. Nishimura Surf. Coat. Technol. 156 2002 328
- (2002) Surf. Coat. Technol. , vol.156 , pp. 328
- Mokuno, Y.¹ Chayahara, A.² Horino, Y.³ Nishimura, Y.⁴

23
- 0034262928
- J. Vilcarromeno, M.N.P. Carreño, and I. Pereyra Thin Solid Films 373 2000 273
- (2000) Thin Solid Films , vol.373 , pp. 273
- Vilcarromeno, J.¹ Carreño, M.N.P.² Pereyra, I.³

24
- 0032483868
- T. Yusuke, T. Nobuhiro, and T. Osamu Thin Solid Films 334 1998 165
- (1998) Thin Solid Films , vol.334 , pp. 165
- Yusuke, T.¹ Nobuhiro, T.² Osamu, T.³

25
- 0042933945
- T. Szörényi, and E. Fogarassy J. Appl. Phys. 94 2003 2097
- (2003) J. Appl. Phys. , vol.94 , pp. 2097
- Szörényi, T.¹ Fogarassy, E.²

26
- 27944456491
- Y.H. Cheng, Z.H. Sun, B.K. Tay, S.P. Lau, X.L. Qiao, J.G. Chen, Y.P. Wu, C.S. Xie, Y.Q. Wang, D.S. Xu, S.B. Mo, and Y.B. Sun Appl. Surf. Sci. 182 2001 33
- (2001) Appl. Surf. Sci. , vol.182 , pp. 33
- Cheng, Y.H.¹ Sun, Z.H.² Tay, B.K.³ Lau, S.P.⁴ Qiao, X.L.⁵ Chen, J.G.⁶ Wu, Y.P.⁷ Xie, C.S.⁸ Wang, Y.Q.⁹ Xu, D.S.¹⁰ Mo, S.B.¹¹ Sun, Y.B.¹²

27
- 4243856801
- S. Souto, M. Pickholz, and M.C. dos Santos Phys. Rev. B 57 1998 2536
- (1998) Phys. Rev. B , vol.57 , pp. 2536
- Souto, S.¹ Pickholz, M.² Dos Santos, M.C.³

28
- 0000774103
- S. Bhattacharyya, C. Cardinaud, and G. Turban J. Appl. Phys. 83 1998 4491
- (1998) J. Appl. Phys. , vol.83 , pp. 4491
- Bhattacharyya, S.¹ Cardinaud, C.² Turban, G.³

29
- 0034096112
- E. Riedo, F. Comin, J. Chevrier, F. Schmithusen, S. Decossas, and M. Sancrotti Surf. Coat. Technol. 125 2000 124
- (2000) Surf. Coat. Technol. , vol.125 , pp. 124
- Riedo, E.¹ Comin, F.² Chevrier, J.³ Schmithusen, F.⁴ Decossas, S.⁵ Sancrotti, M.⁶

30
- 12044253618
- D. Marton, K.J. Bond, and A.H. Al-Bayati Phys. Rev. Lett. 73 1994 118
- (1994) Phys. Rev. Lett. , vol.73 , pp. 118
- Marton, D.¹ Bond, K.J.² Al-Bayati, A.H.³

31
- 0033420605
- Y.M. Ng, C.W. Ong, X.A. Zhao, and C.L. Choy J. Vac. Sci. Technol. A 17 1999 584
- (1999) J. Vac. Sci. Technol. A , vol.17 , pp. 584
- Ng, Y.M.¹ Ong, C.W.² Zhao, X.A.³ Choy, C.L.⁴

32
- 0001662102
- T. Heitz, B. Drevillon, C. Godet, and J.E. Bouree Phys. Rev. B 58 1998 13957
- (1998) Phys. Rev. B , vol.58 , pp. 13957
- Heitz, T.¹ Drevillon, B.² Godet, C.³ Bouree, J.E.⁴

33
- 0001548543
- J.H. Kaufman, S. Metin, and D.D. Saperstein Phys. Rev. B 39 1989 13053
- (1989) Phys. Rev. B , vol.39 , pp. 13053
- Kaufman, J.H.¹ Metin, S.² Saperstein, D.D.³

34
- 0033581061
- Y. Liu, C. Jia, and H. Do Surf. Coat. Technol. 115 1999 95
- (1999) Surf. Coat. Technol. , vol.115 , pp. 95
- Liu, Y.¹ Jia, C.² Do, H.³

35
- 0034047266
- R. Kurt, R. Sanjines, A. Karimi, and F. Lévy Diam. Relat. Mater. 9 2000 566
- (2000) Diam. Relat. Mater. , vol.9 , pp. 566
- Kurt, R.¹ Sanjines, R.² Karimi, A.³ Lévy, F.⁴

36
- 0033896091
- Y. Kusano, Z.H. Barber, J.E. Evetts, and I.M. Hutchings Surf. Coat. Technol. 124 2000 104
- (2000) Surf. Coat. Technol. , vol.124 , pp. 104
- Kusano, Y.¹ Barber, Z.H.² Evetts, J.E.³ Hutchings, I.M.⁴

37
- 0032027332
- Y. Taki, and O. Takai Thin Solid Films 316 1998 45
- (1998) Thin Solid Films , vol.316 , pp. 45
- Taki, Y.¹ Takai, O.²

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