Microstructure and nanomechanical properties of nitrogenated amorphous carbon thin films synthesized by reactive radio frequency sputtering

Journal of Applied Physics

Volumn 85, Issue 5, 1999, Pages 2642-2651

  Lu, W ^a   Komvopoulos, K ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000113428     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.369581     Document Type: Article

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