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Applied Surface Science

Volumn 247, Issue 1-4, 2005, Pages 182-187

Thickness distribution of carbon nitride films grown by inverse-pulsed laser deposition

(3) Egerhazi L a Geretovszky, Zs a Szorenyi T b

a UNIVERSITY OF SZEGED (Hungary)

b RESEARCH GROUP ON LASER PHYSICS (Hungary)

Author keywords

Carbon nitride; Growth process; Inverse pulsed laser deposition; Laser plasma; Thin films

Indexed keywords

CARBON NITRIDE; EXCIMER LASERS; FILM GROWTH; LASER PRODUCED PLASMAS; PROFILOMETRY; THIN FILMS;

ELLIPTICAL SYMMETRY; INVERSE PULSED LASER DEPOSITION (IPLD); LATERAL DISTRIBUTIONS; STYLUS PROFILOMETRY;

PULSED LASER DEPOSITION;

EID: 19744374020 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/j.apsusc.2005.01.041 Document Type: Article

Times cited : (25)

References (20)

1
- 0002951422
- C. Illgner, P. Schaaf, K.-P. Lieb, R. Queitsch, and J. Barnikel J. Appl. Phys. 83 1998 2907
- (1998) J. Appl. Phys. , vol.83 , pp. 2907
- Illgner, C.¹ Schaaf, P.² Lieb, K.-P.³ Queitsch, R.⁴ Barnikel, J.⁵

2
- 0000913084
- P. Schaaf, F. Landry, and K.-P. Lieb Appl. Phys. Lett. 74 1999 153
- (1999) Appl. Phys. Lett. , vol.74 , pp. 153
- Schaaf, P.¹ Landry, F.² Lieb, K.-P.³

3
- 0037960049
- M. Han, K.-P. Lieb, E. Carpene, and P. Schaaf J. Appl. Phys. 93 2003 5742
- (2003) J. Appl. Phys. , vol.93 , pp. 5742
- Han, M.¹ Lieb, K.-P.² Carpene, E.³ Schaaf, P.⁴

4
- 0037863048
- D.W. Zeng, K.C. Yung, and C.S. Xie Appl. Surf. Sci. 217 2003 170
- (2003) Appl. Surf. Sci. , vol.217 , pp. 170
- Zeng, D.W.¹ Yung, K.C.² Xie, C.S.³

5
- 0037863062
- M. Mendes, and R. Vilar Appl. Surf. Sci. 217 2003 149
- (2003) Appl. Surf. Sci. , vol.217 , pp. 149
- Mendes, M.¹ Vilar, R.²

6
- 36549096046
- R. Kelly J. Chem. Phys. 92 1990 5047
- (1990) J. Chem. Phys. , vol.92 , pp. 5047
- Kelly, R.¹

7
- 0001379478
- R. Kelly Phys. Rev. A 46 1992 860
- (1992) Phys. Rev. a , vol.46 , pp. 860
- Kelly, R.¹

8
- 0026221343
- R. Kelly, and B. Braren Appl. Phys. B 53 1991 160
- (1991) Appl. Phys. B , vol.53 , pp. 160
- Kelly, R.¹ Braren, B.²

9
- 0000425484
- R. Kelly, and A. Miotello Appl. Phys. B 57 1993 145
- (1993) Appl. Phys. B , vol.57 , pp. 145
- Kelly, R.¹ Miotello, A.²

10
- 0001470938
- R. Kelly, and A. Miotello Nucl. Instrum. Meth. B 91 1994 682
- (1994) Nucl. Instrum. Meth. B , vol.91 , pp. 682
- Kelly, R.¹ Miotello, A.²

11
- 0036902555
- F. Claeyssens, A. Cheesman, S.J. Henley, and M.N.R. Ashfold J. Appl. Phys. 92 2002 6886
- (2002) J. Appl. Phys. , vol.92 , pp. 6886
- Claeyssens, F.¹ Cheesman, A.² Henley, S.J.³ Ashfold, M.N.R.⁴

12
- 0037525475
- S.J. Henley, M.N.R. Ashfold, and S.R.J. Pearce Appl. Surf. Sci. 217 2003 68
- (2003) Appl. Surf. Sci. , vol.217 , pp. 68
- Henley, S.J.¹ Ashfold, M.N.R.² Pearce, S.R.J.³

13
- 0037009770
- A. Masuda, S. Usui, Y. Yamanaka, Y. Yonezawa, T. Minamikawa, M. Suzuki, A. Morimoto, M. Kumeda, and T. Shimizu Thin Solid Films 416 2002 106
- (2002) Thin Solid Films , vol.416 , pp. 106
- Masuda, A.¹ Usui, S.² Yamanaka, Y.³ Yonezawa, Y.⁴ Minamikawa, T.⁵ Suzuki, M.⁶ Morimoto, A.⁷ Kumeda, M.⁸ Shimizu, T.⁹

14
- 0000468427
- D.B. Geohegan, A.A. Puretzky, G. Duscher, and S.J. Pennycook Appl. Phys. Lett. 72 1998 2987
- (1998) Appl. Phys. Lett. , vol.72 , pp. 2987
- Geohegan, D.B.¹ Puretzky, A.A.² Duscher, G.³ Pennycook, S.J.⁴

15
- 0032606461
- D.B. Geohegan, A.A. Puretzky, and D.J. Rader Appl. Phys. Lett. 74 1999 3788
- (1999) Appl. Phys. Lett. , vol.74 , pp. 3788
- Geohegan, D.B.¹ Puretzky, A.A.² Rader, D.J.³

16
- 0033905520
- W. Marine, L. Patrone, B. Luk'yanchuk, and M. Sentis Appl. Surf. Sci. 154-155 2000 345 and references therein
- (2000) Appl. Surf. Sci. , vol.154-155 , pp. 345
- Marine, W.¹ Patrone, L.² Luk'Yanchuk, B.³ Sentis, M.⁴

17
- 4344588323
- A.A. Morozov Appl. Phys. A 79 2004 997
- (2004) Appl. Phys. a , vol.79 , pp. 997
- Morozov, A.A.¹

18
- 1542740533
- T. Szörényi, and Zs. Geretovszky Thin Solid Films 453-454 2004 431
- (2004) Thin Solid Films , vol.453-454 , pp. 431
- Szörényi, T.¹ Geretovszky, Zs.²

19
- 1542635989
- Zs. Geretovszky, and T. Szörényi Thin Solid Films 453-454 2004 172
- (2004) Thin Solid Films , vol.453-454 , pp. 172
- Geretovszky, Zs.¹ Szörényi, T.²

20
- 4344563263
- T. Szörényi, B. Hopp, and Zs. Geretovszky Appl. Phys. A 79 2004 1207
- (2004) Appl. Phys. a , vol.79 , pp. 1207
- Szörényi, T.¹ Hopp, B.² Geretovszky, Zs.³

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