Resonant magnetic field sensor with frequency output

Journal of Microelectromechanical Systems

Volumn 15, Issue 5, 2006, Pages 1098-1107

  Sunier, Robert ^a,c   Vancura, Tobias ^a,d   Li, Yue ^a,e   Kirstein, Kay Uwe ^a   Baltes, Henry ^a   Brand, Oliver ^b  

^a ETH ZURICH   (Switzerland)

^b GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^c Sensirion ^*  (Switzerland)

^d Nanonis AG   (Switzerland)

^e CSEM   (Switzerland)

Author keywords

CMOS; Electronic compass; Magnetic field sensor; Microsensor; Resonator

Indexed keywords

ELECTRONIC COMPASS; FREQUENCY OUTPUT; MAGNETIC FIELD SENSOR;

CMOS INTEGRATED CIRCUITS; ELECTRIC CURRENTS; MAGNETIC FIELD EFFECTS; MICROMACHINING; OSCILLATIONS; OSCILLATORS (ELECTRONIC); RESONATORS;

MICROSENSORS;

EID: 33750000134     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2006.880212     Document Type: Article

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