Resonant mechanical magnetic sensor in standard CMOS

IEEE Electron Device Letters

Volumn 19, Issue 12, 1998, Pages 496-498

  Eyre, Beverley ^a   Pister, Kristofer S J ^b   Kaiser, William ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Magnetic sensor; Microcoil; Resonant mechanical sensor

Indexed keywords

MAGNETIC RESONANCE; NATURAL FREQUENCIES; SEMICONDUCTOR DEVICE MANUFACTURE; SENSORS; VIBRATION MEASUREMENT;

LORENTZ FORCE OSCILLATORS; RESONANT MAGNETIC SENSORS;

CMOS INTEGRATED CIRCUITS;

EID: 0032299314     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/55.735758     Document Type: Article

References (10)

1. H. Baltes and R. Popovic, "Integrated semiconductor magnetic field sensors," Proc. IEEE, vol. 74, no. 8, pp. 1107-1132, 1986.
2. H. P. Baltes, "CMOS as sensor technology," Sensors and Actuators, vols. A37-A38, pp. 51-56, June-Aug. 1993.
3. Z. Kadar, A. Bossche, and J. Mookinger, "Integrated resonant magnetic-field sensor," Sensors and Actuators, vol. A41, nos. 1-3, pp. 66-69, Apr. 1994.
4. B. shen and W. Allegretto, "CMOS micromachined cantilever-in-cantilever devices with magnetic actuation," IEEE Electron Device Lett., vol. 17, pp. 372-374, July 1996.
5. T. Hirota, T. Siraiwa, K. Hiramoto, and M. Ishihara, "Development of micro-coil sensor for measuring magnetic field leakage," Jpn. J. Appl. Phys., vol. 32, no. 7, pp. 3328-3329, July 1993.
6. B. Eyre, K. S. J. Pister, and W. Gekelman, "Multi-axis micro-coil sensor in standard CMOS," in SPIE Symp. Micro-Machining and Micro-Fabrication, Austin, TX, Oct. 1995, vol. 2642, pp. 183-191.
7. F. Chang, R. Yeh, G. Lin, P. B. Chu, E. Hoffman, E. Kruglick, and K. Pister, "Gas-phase silicon micromachining and xenon difluoride," in SPIE Symp. Micro-Machining and Micro-Fabrication, Austin, TX, Oct. 1995, vol. 2641, pp. 117-128.
8. M. Parameswaran, H. Baltes, L. Ristic, A. Dhaded, and A. Robinson, "A new approach to the fabrication micromechanical structures," Sensors and Actuators, pp. 289-307, 1989.
9. P. J. French and A. G. R. Evans, "Polycrystalline silicon strain sensors," Sensors and Actuators, vol. 8, pp. 219-225, 1985.
10. G. Lin, K. S. J. Pister, and K. P. Roos, "Standard CMOS piezoresistive sensor to quantify heart cell contractile forces," in Proc. IEEE Micro Electro Mechanical Systems Workshop, San Diego, San Diego, Feb. 1996, pp. 150-155.