Analytic modeling and FEM simulation of a resonant micromachined magnetic field sensor

Canadian Conference on Electrical and Computer Engineering

Volumn 1, Issue , 2004, Pages 0189-0192

  Bahreyni, Behraad ^a   Shafai, Cyrus ^a  

^a UNIVERSITY OF MANITOBA   (Canada)

Author keywords

Micromachining; Modeling; Resonant Sensor

Indexed keywords

ELASTIC MODULI; FINITE ELEMENT METHOD; MAGNETIC FIELDS; MAGNETORESISTANCE; MICROMACHINING; ROBUSTNESS (CONTROL SYSTEMS); SQUIDS;

FLEXURAL BEAMS; HALL SENSORS; MAGNETIC FIELD SENSORS; RAYLEIGH'S ENERGY;

SENSORS;

EID: 4944252941     PISSN: 08407789     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)

1. R. S. Popovic and H. P. Baltes, "A CMOS magnetic field sensor," IEEE Journal of Sotid-State Circuits, vol. 18, no. 4, pp. 426 - 428, August 1983.
2. T. M. Liakopoulos and C. H. Ahn, "A micro-fluxgate magnetic sensor using micromachined planar solenoid coils," Sensors and Actuators A: Physical, vol. 77, pp. 66-72, 1999.
3. T.C. Leichle, M. von Arx, and M. G. Allen, "A micromachined resonant magnetic field sensor," Proceedings of the 14th IEEE International Conference on Micro Electro Mechanical Systems; MEMS 2001, pp. 274-277, January 2001.
4. M. Paranjape, F. Giacomozzi, L. Landsberger, M. Kahrizi, B. Margesin, B. Nilkpour, and M. Zen, "A micromachined angled Hall magnetic field sensor using novel in-cavity patterning," Proceedings of the 1997 International Conference on Solid State Sensors and Actuators; TRANSDUCERS '97,vol. 1, pp. 397-400, June 1997.
5. ANSYS, Inc., USA, http://www.ansys.com.
6. H. A. C. Tilmans, "Micro-mechanical sensors using encapsulated built-in resonant strain gauges." Ph.D. Dissertation, University of Twente, Netherlands, 1993.
7. M. Esashi, S. Sugiyama, K. Ikeda, Y. Wang, and H. Miyashita, "Vacuum-Sealed Silicon Micromachined Pressure Sensors," Proceedings of The IEEE, vol. 86, no. 8, pp. 1627-1639, August 1998.
8. M. Elwenspoek and R. Wiegerink, Mechanical Microsensors., Germany, Springer Verlog, 2001.
9. W. A. Tang, "Electrostatic comb drive for resonant sensor and actuator applications," Ph.D. Dissertation, University of California, Berkeley, USA, 1992.
10. W. T. Thomson, Theory of Vibration with Applications., USA, Prentice Hall Inc., 1981.
11. K. A. Gibbons, J. T. Borenstein, D. S. Notes, M. S. Weinberg, and D. L. Trumper, "The design, fabrication, and testing of a micromeehanical silicon oscillating accelerometer," Proceedings of the AIAA Conference on Guidance and Control, USA, August 1998.