A micromachined resonant magnetic field sensor

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2001, Pages 274-277

  Leichle T C ^a   Von Arx, M ^a   Allen, M G ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MICROMECHANICS; ELECTROPLATING; MAGNETIC FIELDS; MAGNETIC RESONANCE; MICROMACHINING; PERMANENT MAGNETS; RESONATORS; SENSITIVITY ANALYSIS;

MAGNETIC FIELD SENSORS;

MICROSENSORS;

EID: 0035007704     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)