-
1
-
-
0022813844
-
Integrated silicon magnetic-field sensor
-
S. Kordic, Integrated silicon magnetic-field sensor, Sensors Actuators 10 (1968) 347-378.
-
(1968)
Sensors Actuators
, vol.10
, pp. 347-378
-
-
Kordic, S.1
-
2
-
-
0022011010
-
Resonator sensors - A review
-
R.M. Langdom, Resonator sensors - a review, J. Phys. E: Sci. Instr. 18 (1985) 103-113.
-
(1985)
J. Phys. E: Sci. Instr.
, vol.18
, pp. 103-113
-
-
Langdom, R.M.1
-
3
-
-
0020127035
-
Silicon as a mechanical material
-
K.E. Petersen, Silicon as a mechanical material, Proc. IEEE 70 (1982) 420-457.
-
(1982)
Proc. IEEE
, vol.70
, pp. 420-457
-
-
Petersen, K.E.1
-
4
-
-
0000183553
-
Quality factor of torsional resonators in the low-pressure region
-
Zs. Kádár, A. Bossche, J. Mollinger, Quality factor of torsional resonators in the low-pressure region, Sensors Actuators A 53 (1996) 299-303.
-
(1996)
Sensors Actuators A
, vol.53
, pp. 299-303
-
-
Kádár, Zs.1
Bossche, A.2
Mollinger, J.3
-
5
-
-
4243679469
-
-
PhD Thesis, Electronic Instrumentation Laboratory, Delft University of Technology, The Netherlands
-
Zsolt Kádár, Integrated resonant magnetic field sensor, PhD Thesis, Electronic Instrumentation Laboratory, Delft University of Technology, The Netherlands, 1997.
-
(1997)
Integrated Resonant Magnetic Field Sensor
-
-
Kádár, Z.1
-
6
-
-
0027577102
-
DIMES-01, a baseline bifet process for smart sensor experimentation
-
L.K. Nanver, E.J.G. Goudena, H.W. van Zeijl, DIMES-01, a baseline bifet process for smart sensor experimentation, Sensors Actuators A 36 (1993) 139-147.
-
(1993)
Sensors Actuators A
, vol.36
, pp. 139-147
-
-
Nanver, L.K.1
Goudena, E.J.G.2
Van Zeijl, H.W.3
-
7
-
-
0014750259
-
Electrochemically controlled thinning of silicon
-
H.A. Wagganer, Electrochemically controlled thinning of silicon, Bell Syst. Technol. J. 50 (1970) 473-475.
-
(1970)
Bell Syst. Technol. J.
, vol.50
, pp. 473-475
-
-
Wagganer, H.A.1
-
8
-
-
0042869308
-
Vacuum sealing by anodic bonding
-
N. Ura, K. Nakaichi, K. Minami, M. Esashi, Vacuum sealing by anodic bonding, The 11th Sensor Symposium, Late News Papers, 1992, p. 63.
-
(1992)
The 11th Sensor Symposium, Late News Papers
, pp. 63
-
-
Ura, N.1
Nakaichi, K.2
Minami, K.3
Esashi, M.4
-
9
-
-
0030100285
-
Aluminium press-on contacts for glass-to-silicon anodic bonding
-
Zs. Kádár, A. Bossche, J. Mollinger, Aluminium press-on contacts for glass-to-silicon anodic bonding, Sensors Actuators A 52 (1996) 151-155.
-
(1996)
Sensors Actuators A
, vol.52
, pp. 151-155
-
-
Kádár, Zs.1
Bossche, A.2
Mollinger, J.3
-
10
-
-
0010375268
-
-
Master's Thesis A94-09, Laboratory of Electronic Instrumentation, Delft University of Technology, Delft, The Netherlands
-
H.R.C. Strato, Glass technology, Master's Thesis A94-09, Laboratory of Electronic Instrumentation, Delft University of Technology, Delft, The Netherlands, 1994.
-
(1994)
Glass Technology
-
-
Strato, H.R.C.1
-
11
-
-
0011006839
-
The theory of oscillating-vane vacuum gauges
-
R.G. Christian, The theory of oscillating-vane vacuum gauges, Vacuum 16 (4) (1966) 175-178.
-
(1966)
Vacuum
, vol.16
, Issue.4
, pp. 175-178
-
-
Christian, R.G.1
|